JPH01126511U - - Google Patents
Info
- Publication number
- JPH01126511U JPH01126511U JP2194888U JP2194888U JPH01126511U JP H01126511 U JPH01126511 U JP H01126511U JP 2194888 U JP2194888 U JP 2194888U JP 2194888 U JP2194888 U JP 2194888U JP H01126511 U JPH01126511 U JP H01126511U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- measured
- workpiece
- projection lens
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2194888U JPH01126511U (OSRAM) | 1988-02-23 | 1988-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2194888U JPH01126511U (OSRAM) | 1988-02-23 | 1988-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01126511U true JPH01126511U (OSRAM) | 1989-08-29 |
Family
ID=31239627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2194888U Pending JPH01126511U (OSRAM) | 1988-02-23 | 1988-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01126511U (OSRAM) |
-
1988
- 1988-02-23 JP JP2194888U patent/JPH01126511U/ja active Pending
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