JPH01126317A - Ultraviolet ray curing type polyorganosiloxane composition - Google Patents
Ultraviolet ray curing type polyorganosiloxane compositionInfo
- Publication number
- JPH01126317A JPH01126317A JP62284444A JP28444487A JPH01126317A JP H01126317 A JPH01126317 A JP H01126317A JP 62284444 A JP62284444 A JP 62284444A JP 28444487 A JP28444487 A JP 28444487A JP H01126317 A JPH01126317 A JP H01126317A
- Authority
- JP
- Japan
- Prior art keywords
- group
- polyorganosiloxane
- tert
- parts
- formula
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 36
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims abstract description 18
- 150000002576 ketones Chemical class 0.000 claims abstract description 4
- -1 tert-hexyl group Chemical group 0.000 claims description 36
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 claims description 10
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 claims description 10
- 239000012965 benzophenone Substances 0.000 claims description 10
- WXDJDZIIPSOZAH-UHFFFAOYSA-N 2-methylpentan-2-yl benzenecarboperoxoate Chemical compound CCCC(C)(C)OOC(=O)C1=CC=CC=C1 WXDJDZIIPSOZAH-UHFFFAOYSA-N 0.000 claims description 9
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 7
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 6
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- IJOHRMCEDZASLA-UHFFFAOYSA-N 2,4,4-trimethylpentan-2-yl benzenecarboperoxoate Chemical compound CC(C)(C)CC(C)(C)OOC(=O)C1=CC=CC=C1 IJOHRMCEDZASLA-UHFFFAOYSA-N 0.000 claims description 3
- 125000001931 aliphatic group Chemical group 0.000 claims description 3
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 claims description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 3
- KRIOVPPHQSLHCZ-UHFFFAOYSA-N propiophenone Chemical compound CCC(=O)C1=CC=CC=C1 KRIOVPPHQSLHCZ-UHFFFAOYSA-N 0.000 claims description 3
- 125000003236 benzoyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C(*)=O 0.000 claims 1
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 abstract description 12
- 238000000576 coating method Methods 0.000 abstract description 11
- 239000000463 material Substances 0.000 abstract description 8
- 239000004065 semiconductor Substances 0.000 abstract description 8
- 150000002430 hydrocarbons Chemical class 0.000 abstract description 6
- 238000002156 mixing Methods 0.000 abstract description 4
- 229930195733 hydrocarbon Natural products 0.000 abstract description 2
- 239000004215 Carbon black (E152) Substances 0.000 abstract 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 abstract 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 abstract 1
- WURBFLDFSFBTLW-UHFFFAOYSA-N benzil Chemical compound C=1C=CC=CC=1C(=O)C(=O)C1=CC=CC=C1 WURBFLDFSFBTLW-UHFFFAOYSA-N 0.000 abstract 1
- 238000001723 curing Methods 0.000 description 15
- 239000000758 substrate Substances 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 235000019645 odor Nutrition 0.000 description 9
- 239000000047 product Substances 0.000 description 9
- 239000004205 dimethyl polysiloxane Substances 0.000 description 8
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 8
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 6
- 239000004593 Epoxy Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- XMLYCEVDHLAQEL-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-phenylpropan-1-one Chemical compound CC(C)(O)C(=O)C1=CC=CC=C1 XMLYCEVDHLAQEL-UHFFFAOYSA-N 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 229910021485 fumed silica Inorganic materials 0.000 description 4
- GJBRNHKUVLOCEB-UHFFFAOYSA-N tert-butyl benzenecarboperoxoate Chemical compound CC(C)(C)OOC(=O)C1=CC=CC=C1 GJBRNHKUVLOCEB-UHFFFAOYSA-N 0.000 description 4
- 206010034972 Photosensitivity reaction Diseases 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 3
- 150000001451 organic peroxides Chemical class 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 230000036211 photosensitivity Effects 0.000 description 3
- 238000004382 potting Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 125000003396 thiol group Chemical group [H]S* 0.000 description 3
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 3
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 2
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 2
- SZNYYWIUQFZLLT-UHFFFAOYSA-N 2-methyl-1-(2-methylpropoxy)propane Chemical compound CC(C)COCC(C)C SZNYYWIUQFZLLT-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 150000001728 carbonyl compounds Chemical class 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- LQNUZADURLCDLV-UHFFFAOYSA-N nitrobenzene Chemical compound [O-][N+](=O)C1=CC=CC=C1 LQNUZADURLCDLV-UHFFFAOYSA-N 0.000 description 2
- HMMGMWAXVFQUOA-UHFFFAOYSA-N octamethylcyclotetrasiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O1 HMMGMWAXVFQUOA-UHFFFAOYSA-N 0.000 description 2
- 125000000962 organic group Chemical group 0.000 description 2
- 238000000016 photochemical curing Methods 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- QEQBMZQFDDDTPN-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy benzenecarboperoxoate Chemical compound CC(C)(C)OOOC(=O)C1=CC=CC=C1 QEQBMZQFDDDTPN-UHFFFAOYSA-N 0.000 description 1
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- KETQAJRQOHHATG-UHFFFAOYSA-N 1,2-naphthoquinone Chemical compound C1=CC=C2C(=O)C(=O)C=CC2=C1 KETQAJRQOHHATG-UHFFFAOYSA-N 0.000 description 1
- 229940105324 1,2-naphthoquinone Drugs 0.000 description 1
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 1
- IMDHDEPPVWETOI-UHFFFAOYSA-N 1-(4-tert-butylphenyl)-2,2,2-trichloroethanone Chemical compound CC(C)(C)C1=CC=C(C(=O)C(Cl)(Cl)Cl)C=C1 IMDHDEPPVWETOI-UHFFFAOYSA-N 0.000 description 1
- HUDYANRNMZDQGA-UHFFFAOYSA-N 1-[4-(dimethylamino)phenyl]ethanone Chemical compound CN(C)C1=CC=C(C(C)=O)C=C1 HUDYANRNMZDQGA-UHFFFAOYSA-N 0.000 description 1
- DZZAHLOABNWIFA-UHFFFAOYSA-N 2-butoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCCCC)C(=O)C1=CC=CC=C1 DZZAHLOABNWIFA-UHFFFAOYSA-N 0.000 description 1
- LOCWBQIWHWIRGN-UHFFFAOYSA-N 2-chloro-4-nitroaniline Chemical compound NC1=CC=C([N+]([O-])=O)C=C1Cl LOCWBQIWHWIRGN-UHFFFAOYSA-N 0.000 description 1
- QPXVRLXJHPTCPW-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-(4-propan-2-ylphenyl)propan-1-one Chemical compound CC(C)C1=CC=C(C(=O)C(C)(C)O)C=C1 QPXVRLXJHPTCPW-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 1
- BAJQRLZAPXASRD-UHFFFAOYSA-N 4-Nitrobiphenyl Chemical group C1=CC([N+](=O)[O-])=CC=C1C1=CC=CC=C1 BAJQRLZAPXASRD-UHFFFAOYSA-N 0.000 description 1
- FRTIROQJSSTRHS-UHFFFAOYSA-N 4-chloro-2-(2-methylpentan-2-ylperoxy)benzoic acid Chemical compound CCCC(C)(C)OOC1=C(C=CC(=C1)Cl)C(=O)O FRTIROQJSSTRHS-UHFFFAOYSA-N 0.000 description 1
- TYMLOMAKGOJONV-UHFFFAOYSA-N 4-nitroaniline Chemical compound NC1=CC=C([N+]([O-])=O)C=C1 TYMLOMAKGOJONV-UHFFFAOYSA-N 0.000 description 1
- BTJIUGUIPKRLHP-UHFFFAOYSA-N 4-nitrophenol Chemical compound OC1=CC=C([N+]([O-])=O)C=C1 BTJIUGUIPKRLHP-UHFFFAOYSA-N 0.000 description 1
- 229910002012 Aerosil® Inorganic materials 0.000 description 1
- 229910002016 Aerosil® 200 Inorganic materials 0.000 description 1
- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical group O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical group [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000004965 Silica aerogel Substances 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 125000002877 alkyl aryl group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- RJGDLRCDCYRQOQ-UHFFFAOYSA-N anthrone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3CC2=C1 RJGDLRCDCYRQOQ-UHFFFAOYSA-N 0.000 description 1
- 150000008425 anthrones Chemical class 0.000 description 1
- 125000003710 aryl alkyl group Chemical group 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- IVRMZWNICZWHMI-UHFFFAOYSA-N azide group Chemical group [N-]=[N+]=[N-] IVRMZWNICZWHMI-UHFFFAOYSA-N 0.000 description 1
- 150000001555 benzenes Chemical class 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 125000004218 chloromethyl group Chemical group [H]C([H])(Cl)* 0.000 description 1
- 125000000068 chlorophenyl group Chemical group 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 125000000596 cyclohexenyl group Chemical group C1(=CCCCC1)* 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 230000003631 expected effect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 238000001879 gelation Methods 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- QNGNSVIICDLXHT-UHFFFAOYSA-N para-ethylbenzaldehyde Natural products CCC1=CC=C(C=O)C=C1 QNGNSVIICDLXHT-UHFFFAOYSA-N 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 230000002165 photosensitisation Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 125000001973 tert-pentyl group Chemical group [H]C([H])([H])C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
- 238000004383 yellowing Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は紫外線照射により硬化してゲル状、ゴム状およ
び樹脂状となるポリオルガノシロキサン組成物に関し、
更に詳しくは、半導体の接合部を被覆保護したり、ポツ
ティングなどの方法で半導体装置の樹脂封止をしたりす
る半導体コーテイング材、または混成集積回路やプリン
ト配線基板上に各種電気部品を実装するアッセンブリ工
程において、部品の仮固定をする一時的固定材として有
用な紫外線硬化型ポリオルガノシロキサン組成物に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a polyorganosiloxane composition that becomes gel-like, rubber-like, or resin-like when cured by ultraviolet irradiation.
More specifically, we use semiconductor coating materials to cover and protect the joints of semiconductors and encapsulate semiconductor devices with resin using methods such as potting, and assemblies that mount various electrical components on hybrid integrated circuits and printed wiring boards. The present invention relates to an ultraviolet curable polyorganosiloxane composition useful as a temporary fixing material for temporarily fixing parts in a process.
ポリオルガノシロキサンは、電気絶縁性、耐熱性、防湿
性など優れた性質を有するため、電気・電子分野、光学
、オプトエレクトロニクス、センサーなどの分野でコー
テイング材やポツティング材などの用途に広く使用され
ている。中でも紫外線照射によって硬化するポリオルガ
ノシロキサン組成物は、加熱を必要とせず、短時間で、
反応副生物の悪影響を心配することもなく処理できるこ
とから、特にこの分野における用途が広がっている。Polyorganosiloxane has excellent properties such as electrical insulation, heat resistance, and moisture resistance, so it is widely used as coating materials and potting materials in fields such as electrical and electronic fields, optics, optoelectronics, and sensors. There is. Among them, polyorganosiloxane compositions that cure by UV irradiation do not require heating and can be cured in a short time.
Since it can be treated without worrying about the adverse effects of reaction by-products, its use is particularly widespread in this field.
シリコーンゴム組成物を紫外線で硬化させて、半導体の
接合部等を被覆保護する技術は既知である。そのような
シリコーンゴム組成物として、(1)米国特許第3.7
26.710号は、ビニル基含有ポリオルガノシロキサ
ンに各種の増感剤を添加したもので、高強度紫外線照射
で硬化する組成物を提示している。しかし、この組成物
の硬化は表面のみにとどまり、内部まで均一に硬化しな
いという欠点があった。(2)また、米国特許第3、8
16.282号は、メルカプト基含有ポリオルガノシロ
キサン、ポリメチルビニルシロキサンおよび各種の有機
過酸化物から成り、付加架橋する組成物を提示している
。しかし、この組成物の欠点として、保存安定性が悪く
室温においてもゲル化が進行してしまうということ、メ
ルカプト基含有ポリオルガノシロキサンの合成に多段階
の工程を要すること、メルカプト基特有の悪臭を放ち、
また、シリコーン特有の耐熱性も失われていること、そ
して接着性に関しては金属基板での接着性は良好である
が、加熱によって金属を硫化物に変換してしまうという
ことなどが挙げられる。(3)また、特公昭52−40
334号公報は、ビニル基含有ポリオルガノシロキサン
とポリオルガノハイドロジエンシロキサンとを増感剤の
存在下に付加架橋させる組成物を示しているが、これも
硬化が表面のみにとどまり、内部まで硬化しないうえに
、発泡現象を引き起こすという欠点を有している。(4
)また、特開昭48−19682号公報は、アクリル系
不飽和基含有ポリオルガノシロキサンおよび増感剤から
成る組成物を提案している。しかし、これは優れた感光
効果を持つ反面、酸素の影響を受けやすく、感光性の経
時変化および暗減衰が大きいという欠点があり、その上
、アクリル系不飽和基含有ポリオルガノシロキサンの合
成に多段階を必要とし、得られたシリコーンの耐熱性が
悪いという欠点もあった。(5)また、特開昭54−6
9197号公報は、アジド基含有ポリオルガノシロキサ
ン、ビニル基含有ポリオルガノシロキサンおよび有機過
酸化物から成る組成物を提案している。これは、優れた
感光効果をもち、酸素の影響も受けず、感光性の経時変
化も少ないという利点があったが、黄変するという欠点
があった。(6)また、特開昭55−125123号公
報は、ビニル基含有ポリオルガノシロキサンあるいはビ
ニル基含有ポリオルガノシロキサンと有機過酸化物とか
ら成る組成物に、波長100〜300nmの紫外線を照
射して硬化する方法を提案している。しかしこの方法は
酸素の影響を受けやすく、硬化時間が長く、不完全なも
のであった。(7)また、特開昭58−89650号公
報はケイ素原子に結合したビニル基と水素基を同一分子
中にもつポリオルガノハイドロジエンシロキサンに低分
子ポリビニルメチルシロキサンとtert−ブチルペル
オキシベンゾエートを加えることにより、内部から表面
まで均一に硬化させ、各種基板に接着させる方法を提案
している。しかしこの方法は、基板上に塗布された皮膜
が紫外線を照射するまでに長時間放置されると、ter
t−ブチルペルオキシベンゾエートが揮散する為に、薄
膜では硬化しなくなる一方、厚膜部では、硬化が甘く不
十分となり、硬化物の物性が出なくなるという欠点があ
った。また、tert−ブチルペルオキシベンゾエート
またはその分解生成物の臭いが人によっては著しく不快
である、という指摘があり、大きな問題となっていた。2. Description of the Related Art There is a known technique for coating and protecting semiconductor joints and the like by curing a silicone rubber composition with ultraviolet rays. Such silicone rubber compositions include (1) U.S. Patent No. 3.7;
No. 26.710 proposes a composition that is made by adding various sensitizers to a vinyl group-containing polyorganosiloxane and is cured by high-intensity ultraviolet irradiation. However, this composition had the disadvantage that it only cured on the surface and did not harden uniformly to the inside. (2) Also, U.S. Patent Nos. 3 and 8
No. 16.282 presents an addition-crosslinking composition consisting of a mercapto group-containing polyorganosiloxane, polymethylvinylsiloxane and various organic peroxides. However, the disadvantages of this composition are that it has poor storage stability and gelation progresses even at room temperature, that synthesis of mercapto group-containing polyorganosiloxane requires a multi-step process, and that it does not produce the bad odor characteristic of mercapto groups. Release,
Another problem is that the heat resistance characteristic of silicone is lost, and although the adhesion to metal substrates is good, the metal is converted to sulfide by heating. (3) Also, special public service 1972-40
No. 334 discloses a composition in which a vinyl group-containing polyorganosiloxane and a polyorganohydrodiene siloxane are addition-crosslinked in the presence of a sensitizer, but this also cures only the surface and does not cure internally. Moreover, it has the disadvantage of causing a foaming phenomenon. (4
) Furthermore, JP-A-48-19682 proposes a composition comprising a polyorganosiloxane containing an acrylic unsaturated group and a sensitizer. However, although it has an excellent photosensitizing effect, it has the disadvantage that it is easily affected by oxygen and has large changes in photosensitivity over time and dark decay.In addition, it is difficult to synthesize polyorganosiloxanes containing acrylic unsaturated groups. There were also disadvantages in that it required several steps and the resulting silicone had poor heat resistance. (5) Also, JP-A-54-6
Publication No. 9197 proposes a composition comprising an azide group-containing polyorganosiloxane, a vinyl group-containing polyorganosiloxane, and an organic peroxide. This had the advantage of having excellent photosensitivity, being unaffected by oxygen, and having little change in photosensitivity over time, but had the disadvantage of yellowing. (6) Furthermore, JP-A-55-125123 discloses that a composition comprising a vinyl group-containing polyorganosiloxane or a vinyl group-containing polyorganosiloxane and an organic peroxide is irradiated with ultraviolet rays with a wavelength of 100 to 300 nm. We are proposing a method of hardening. However, this method was sensitive to oxygen, had a long curing time, and was incomplete. (7) Furthermore, JP-A-58-89650 discloses that low-molecular-weight polyvinylmethylsiloxane and tert-butylperoxybenzoate are added to polyorganohydrodienesiloxane which has a silicon-bonded vinyl group and a hydrogen group in the same molecule. We have proposed a method for uniformly curing the material from the inside to the surface and adhering it to various substrates. However, with this method, if the film coated on the substrate is left for a long time before being irradiated with ultraviolet rays,
Since t-butyl peroxybenzoate volatilizes, thin films are no longer cured, while thick films are not cured slowly and are insufficiently cured, resulting in poor physical properties of the cured product. Additionally, it has been pointed out that the odor of tert-butylperoxybenzoate or its decomposition products is extremely unpleasant to some people, which has become a major problem.
本発明の目的は、上記の問題点を解消し、特に塗布して
から紫外線を照射するまでに長時間経過した後も良好な
硬化性を有し、かつ不快とされる臭いの改善された紫外
線硬化型ポリオルガノシロキサン組成物を提供すること
である。The purpose of the present invention is to solve the above-mentioned problems, and in particular, to provide an ultraviolet ray that has good curing properties even after a long period of time has elapsed from application to irradiation with ultraviolet rays, and has an improved odor that is considered to be unpleasant. An object of the present invention is to provide a curable polyorganosiloxane composition.
本発明者等はこれらの目的を達成すべく、鋭意研究を重
ねた結果、分子中にビニル基を所要量含有するポリビニ
ルオルガノシロキサンに炭素数が5個以上の脂肪族アル
コールのペルオキシエステルと、ケトン類の如き増感剤
を加えることにより、塗布後長時間経過後も良好な硬化
性を有し、不快臭も改善されることを見出し、本発明を
なすに至った。In order to achieve these objectives, the present inventors conducted extensive research and found that polyvinylorganosiloxane containing a required amount of vinyl groups in the molecule, a peroxyester of an aliphatic alcohol having 5 or more carbon atoms, and a ketone. The present inventors have discovered that by adding a sensitizer such as the above, good curing properties can be maintained even after a long period of time has passed after application, and unpleasant odor can be improved, and the present invention has been completed.
即ち、本発明は、
(A)平均組成式
%式%
(式中 R1はビニル基を除く置換または非置換の1価
の炭化水素基を表し、aは0.01≦a≦1、bは0≦
b<3、(a+b)は1≦a+b≦3である)で表され
るポリオルガノシロキサン100重量部、
(B)−数式
%式%
(式中 R2は炭素数が5〜12である置換または非置
換の1価の脂肪族炭化水素基、R3は置換または非置換
の1価の芳香族炭化水素基を表す)で表されるペルオキ
シエステル 0.1〜10.0重量部、
および
(C)増感剤 0.01〜5.0重量部から成ることを
特徴とする紫外線硬化型ポリオルガノシロキサン組成物
に関するものである。That is, the present invention provides: (A) average composition formula % formula % (wherein R1 represents a substituted or unsubstituted monovalent hydrocarbon group excluding a vinyl group, a is 0.01≦a≦1, and b is 0≦
b<3, (a+b) is 1≦a+b≦3. 0.1 to 10.0 parts by weight of a peroxyester represented by an unsubstituted monovalent aliphatic hydrocarbon group, R3 represents a substituted or unsubstituted monovalent aromatic hydrocarbon group, and (C) The present invention relates to an ultraviolet curable polyorganosiloxane composition comprising 0.01 to 5.0 parts by weight of a sensitizer.
本発明における(A)成分のポリオルガノシロキサンは
、上記した平均組成式で示されるもので、式中のR’は
ビニル基以外の置換または非置換の1価炭化水素基を表
し、これにはメチル基、エチル基、プロピル基、ブチル
基、イソブチル基、アミル基、ヘキシル基、オクタデシ
ル基などのアルキル基、アリル基、シクロへキセニル基
などのアルケニル基、シクロペンチル基、シクロヘキシ
ル基などのシクロアルキル基、フェニル基、ナフチル基
などのアリール基、ベンジル基、β−フェニルエチル基
などのアラルキル基、トリル基、キシリル基、メシチル
基などのアルカリル基、あるいはこれらの基の水素原子
の1部もしくは全部がハロゲン原子などで置換された基
、例えば3,3.3−トリフルオロプロピルL 3−ク
ロロプロピル基、クロロメチル基、クロロフェニル基、
ジブロモフェニル基などが例示される。The polyorganosiloxane of component (A) in the present invention is represented by the above average compositional formula, where R' represents a substituted or unsubstituted monovalent hydrocarbon group other than a vinyl group; Alkyl groups such as methyl group, ethyl group, propyl group, butyl group, isobutyl group, amyl group, hexyl group, octadecyl group, allyl group, alkenyl group such as cyclohexenyl group, cycloalkyl group such as cyclopentyl group, cyclohexyl group , phenyl group, aryl group such as naphthyl group, aralkyl group such as benzyl group, β-phenylethyl group, alkaryl group such as tolyl group, xylyl group, mesityl group, or a part or all of the hydrogen atoms of these groups Groups substituted with halogen atoms, such as 3,3.3-trifluoropropyl L 3-chloropropyl group, chloromethyl group, chlorophenyl group,
Examples include dibromophenyl group.
なお、本発明においては、ケイ素原子に結合するビニル
基以外の置換または非置換の一価炭化水素基(R’)の
すべてがメチル基であるか、もしくはそれがメチル基と
フェニル基からなるものであることが好ましく、該R1
がメチル基とフェニル基からなる場合には、ケイ素原子
1涸当たりのフェニル基の数が0.0001〜0.1個
の範囲、好ましくは0.0002〜0.03個の範囲で
ある。In addition, in the present invention, all of the substituted or unsubstituted monovalent hydrocarbon groups (R') other than the vinyl group bonded to the silicon atom are methyl groups, or one consisting of a methyl group and a phenyl group. It is preferable that R1
When is composed of a methyl group and a phenyl group, the number of phenyl groups per silicon atom is in the range of 0.0001 to 0.1, preferably in the range of 0.0002 to 0.03.
これはフェニル基を導入することにより、特にシロキサ
ンの被覆が薄いものである場合には光硬化時間を著しく
短縮することができるが、反面、フェニル基の量をあま
り多くするとシロキサンの光透過性が悪くなり、比較的
厚物の硬化物が得られにくくなるからである。By introducing phenyl groups, the photocuring time can be significantly shortened, especially when the siloxane coating is thin, but on the other hand, if the amount of phenyl groups is too large, the light transmittance of the siloxane will decrease. This is because it becomes difficult to obtain a relatively thick cured product.
(A)成分中のケイ素原子1僧当たりのビニル基数aは
前述の0.01≦a≦1の範囲になければならない。a
が0.01未満では硬化性が不十分であり、またaが1
を超えても十分な効果が得られないだけでなく、機械特
性や耐熱性に悪影響があって好ましくない。また、ビニ
ル基以外の炭化水素基の数すも前述の0≦b<3の範囲
とされる。特にビニル基の基数は全有機基の50%以下
であることが好ましく、また25℃における粘度が10
0cSt以上であることが好ましく、100cSt未満
の粘度では硬化性、硬化物の特性において不十分である
。ビニル基の基数および粘度が上記の範囲に含まれない
領域では、上記したように硬化時間が長くなったり、耐
熱性が悪くなったり、硬化物がもろくなったりする。な
お、合成の容易さ、耐熱性、可撓性、架橋効率などの点
から、ビニル基は全有機基中0.02〜10%であるこ
とが好ましく、また粘度は500cSt以上であること
が好ましい。The number a of vinyl groups per silicon atom in component (A) must be in the range of 0.01≦a≦1 as described above. a
If a is less than 0.01, the curability is insufficient, and if a is less than 1
Even if it exceeds 100%, not only will sufficient effects not be obtained, but it will also have an adverse effect on mechanical properties and heat resistance, making it undesirable. Further, the number of hydrocarbon groups other than vinyl groups is also within the range of 0≦b<3. In particular, the number of vinyl groups is preferably 50% or less of all organic groups, and the viscosity at 25°C is 10%.
It is preferable that the viscosity is 0 cSt or more, and a viscosity of less than 100 cSt is insufficient in terms of curability and properties of the cured product. In a region where the number of vinyl groups and the viscosity are not within the above range, the curing time becomes longer, the heat resistance deteriorates, and the cured product becomes brittle, as described above. In addition, from the viewpoint of ease of synthesis, heat resistance, flexibility, crosslinking efficiency, etc., the vinyl group is preferably 0.02 to 10% of the total organic groups, and the viscosity is preferably 500 cSt or more. .
(^)成分の主鎖の構造は、鎖状、環状、分岐状のいず
れでもよく、また一種のポリオルガノシロキサンでも2
種以上のものの混合物であってもよい。(^) The structure of the main chain of the component may be linear, cyclic, or branched, and even a type of polyorganosiloxane may have two
It may be a mixture of more than one species.
本発明における(B)成分のペルオキシエステルは紫外
線を照射したときに分解してラジカルを発生し、上記(
A)成分を硬化させるものである。The peroxyester of the component (B) in the present invention decomposes and generates radicals when irradiated with ultraviolet rays, resulting in the above (
A) It cures the component.
式中のR2は、上記のポリオルガノシロキサンとの相溶
性を付与させるもので、置換または非置換の1価の脂肪
族炭化水素基であり、全炭素数が5〜12の範囲のもの
である。構造的には特に制限されるものではないが、合
成のし易さ、及び相溶性の点から全炭素数は5〜8で、
例えばtert−ペンチル基、tert−ヘキシル基、
tert−オクチル基などが好ましいが、揮散性を抑え
る、不快臭を無くすなどの点からは、tert−ヘキシ
ル基がとりわけ好ましい。R2 in the formula imparts compatibility with the above polyorganosiloxane, is a substituted or unsubstituted monovalent aliphatic hydrocarbon group, and has a total number of carbon atoms in the range of 5 to 12. . There are no particular restrictions on the structure, but from the viewpoint of ease of synthesis and compatibility, the total number of carbon atoms is 5 to 8,
For example, tert-pentyl group, tert-hexyl group,
A tert-octyl group is preferred, but a tert-hexyl group is particularly preferred from the viewpoint of suppressing volatility and eliminating unpleasant odor.
また、式中のR3は置換または非置換の1価の芳香族炭
化水素基で、特にそれ以上に制限されるものではないが
、反応効率の点でベンゼン核を有するものが好ましい。Further, R3 in the formula is a substituted or unsubstituted monovalent aromatic hydrocarbon group, and is not particularly limited, but one having a benzene nucleus is preferable from the viewpoint of reaction efficiency.
本発明のペルオキシエステルは、上記のポリオルガノシ
ロキサンに相溶性があり、しかも着色のないものであり
、tert−へキシルペルオキシベンゾエート、ter
t−オクチルペルオキシベンゾエート、tert−へキ
シルペルオキシ−4−クロロベンゾエート、tert−
へキシルペルオキシ−2,4−ジクロロベンゾエート、
tert−へキシルペルオキシ−4ニトルオエートなど
が例示される。これらのペルオキシエステルの中で、特
に性状が液状で相溶性に優れ、合成も容易で、常温での
蒸気圧も低い点からtert−へキシルペルオキシベン
ゾエートが好ましい。The peroxyester of the present invention is compatible with the above-mentioned polyorganosiloxane and has no coloration, and includes tert-hexylperoxybenzoate, tert-hexylperoxybenzoate, and tert-hexylperoxybenzoate.
t-octylperoxybenzoate, tert-hexylperoxy-4-chlorobenzoate, tert-
hexylperoxy-2,4-dichlorobenzoate,
Examples include tert-hexylperoxy-4 nitruoate. Among these peroxyesters, tert-hexyl peroxybenzoate is particularly preferred because it is liquid, has excellent compatibility, is easy to synthesize, and has a low vapor pressure at room temperature.
(B)成分のペルオキシエステルの配合量は、(A)成
分100重量部に対して0.1〜10.0重量部であり
、0.1〜5.0重量部が好ましい。配合量が0.1重
量部未満では、硬化速度が遅く、十分な架橋構造が得ら
れない。また、10.0重量部を越えて添加しても、期
待する効果が得られない。The amount of peroxyester as component (B) is 0.1 to 10.0 parts by weight, preferably 0.1 to 5.0 parts by weight, per 100 parts by weight of component (A). If the amount is less than 0.1 part by weight, the curing speed will be slow and a sufficient crosslinked structure will not be obtained. Further, even if it is added in an amount exceeding 10.0 parts by weight, the expected effect cannot be obtained.
(C)成分の増感剤は、照射される紫外線のエネルギー
を吸収し、それをペルオキシエステルに伝達することに
より、ペルオキシエステルのラジカル発生を助け、光エ
ネルギーを有効利用して、(A)成分を効率良く硬化さ
せるために添加されるものである。特に厚膜での硬化に
おいてはその深部の硬化性を改善する働きがあり、ペル
オキシエステル単独より、これを併用した場合の方が、
その硬化の速さおよび硬化物特性などにおいて優れた結
果を与える。Component (C), the sensitizer, absorbs the energy of the irradiated ultraviolet rays and transfers it to the peroxyester, thereby helping to generate radicals in the peroxyester, effectively utilizing the light energy, and transmitting it to the peroxyester. It is added to efficiently cure. Particularly when curing thick films, it has the effect of improving the curing properties in the deep part of the film, and when used in combination with peroxyester, it is better to use peroxyester alone than alone.
It provides excellent results in terms of curing speed and properties of the cured product.
本発明の増感剤は、ナフタレン、アントラセンのような
炭化水素類;ニトロベンゼン、p−二トロジフェニル、
p−ニトロアニリン、2−クロロ−4−ニトロアニリン
、p−ニトロフェノール、2,4.6−)リニトロフェ
ノールのようなアミン、ニトロ、フェノール性化合物;
ベンズアルデヒド、アセトフェノン、ベンゾフェノン、
ベンジノペp、 p’−テトラメチルジアミノベンゾフ
ェノンのようなケトン類;ベンゾキノン、1.2−ナフ
トキノン、アントラキノンのようなキノン類;アントロ
ンのようなアントロン類が例示されるが、とりわけカル
ボニル化合物が好ましい。The sensitizer of the present invention includes hydrocarbons such as naphthalene and anthracene; nitrobenzene, p-nitrodiphenyl,
Amine, nitro, phenolic compounds such as p-nitroaniline, 2-chloro-4-nitroaniline, p-nitrophenol, 2,4.6-)linitrophenol;
benzaldehyde, acetophenone, benzophenone,
Examples include ketones such as benzinope p, p'-tetramethyldiaminobenzophenone; quinones such as benzoquinone, 1,2-naphthoquinone, and anthraquinone; and anthrones such as anthrone; carbonyl compounds are particularly preferred.
これらのカルボニル化合物を具体的に例示すると、アセ
トフェノン、プロピオフェノ?、ベンゾフェノン、4.
4’−ジクロロベンゾフェノン、ベンジル、ベンゾイン
、ベンゾインメチルエーテル、ベンゾインエチルエーテ
/lz、ベンゾインイソプロピルエーテル、ベンゾイン
−n−ブチルエーテル、ペンゾインイソブチルエーテ/
へ4′−イソプロピル−2−ヒドロキシ−2−メチル−
プロピオフェノン、2−ヒドロキシ−2−メチル−プロ
ピオフェノン、p−ジメチルアミノアセトフェノン、p
−tert−ブチルトリクロロアセトフェノン、p−t
ert−ブチルジクロロアセトフェノン、2,2°−ジ
ェトキシアセトフェノン、ペンジルジメチルケターノペ
0−ベンゾイル安息香酸メチルなどが挙げられる。これ
らの中で、ポリオルガノシロキサンへの相溶性や配合の
し易さなどの点から、アセトフェノン、プロピオフェノ
ン、ベンゾフェノン、ベンゾインメチルエーテル、ベン
ゾインエチルエーテ/lz。Specific examples of these carbonyl compounds include acetophenone and propiophenone. , benzophenone, 4.
4'-dichlorobenzophenone, benzyl, benzoin, benzoin methyl ether, benzoin ethyl ether/lz, benzoin isopropyl ether, benzoin-n-butyl ether, penzoin isobutyl ether/
to4'-isopropyl-2-hydroxy-2-methyl-
Propiophenone, 2-hydroxy-2-methyl-propiophenone, p-dimethylaminoacetophenone, p
-tert-butyltrichloroacetophenone, p-t
Examples include ert-butyldichloroacetophenone, 2,2°-jethoxyacetophenone, penzyldimethylketanope 0-benzoylbenzoate, and the like. Among these, acetophenone, propiophenone, benzophenone, benzoin methyl ether, benzoin ethyl ether/lz from the viewpoint of compatibility with polyorganosiloxane and ease of blending.
ペンゾインイソプロビルエーテノペベンゾインイソブチ
ルエーテノヘ4゛−イソプロピル−2−ヒドロキシ−2
−メチル−プロピオフェノン、2−ヒドロキシ−2−メ
チル−プロピオフェノン、0−ベンゾイル安息香酸メチ
ルが特に好ましい。Penzoin isopropylethenope Benzoin isobutylethenohe 4'-isopropyl-2-hydroxy-2
-Methyl-propiophenone, 2-hydroxy-2-methyl-propiophenone and methyl 0-benzoylbenzoate are particularly preferred.
(C)成分の増感剤の配合量は(A)成分100重量部
に対して0.01〜5.0重量部であり、0.05〜2
.0重量部が好ましい。配合量が0.01重量部未満で
は十分な光硬化の助長が行えず、硬化速度が遅く、十分
な架橋構造が特に厚膜において得られない。また、5.
0重量部を越えて添加しても、特に効果が上がることも
なく、また、逆に光エネルギーを吸収しすぎて、硬化速
度を遅くしたり、硬化を阻害する。加えて、ポリオルガ
ノシロキサンとの相溶性から白濁や分散不良を起こすこ
ともある。The blending amount of the sensitizer as component (C) is 0.01 to 5.0 parts by weight, and 0.05 to 2 parts by weight per 100 parts by weight of component (A).
.. 0 parts by weight is preferred. If the amount is less than 0.01 part by weight, sufficient photocuring cannot be promoted, the curing speed is slow, and a sufficient crosslinked structure cannot be obtained, especially in thick films. Also, 5.
Even if it is added in an amount exceeding 0 parts by weight, no particular effect will be obtained, and on the contrary, too much light energy will be absorbed, slowing down the curing speed or inhibiting curing. In addition, cloudiness and poor dispersion may occur due to compatibility with polyorganosiloxane.
(C)成分の増感剤は単独でもあるいは2種以上を組み
合わせて添加しても良く、また添加方法としては、液状
のものはそのままか他の溶剤 1に溶かして、固体の
ものは溶剤や他の増感剤あるいはペルオキシエステルに
溶かすか、もしくはその融点以上に温めて、ポリオルガ
ノシロキサンの一部によく分散させて、添加すると良い
。Component (C), the sensitizer, may be added alone or in combination of two or more, and liquid ones may be added as is or dissolved in another solvent 1, and solid ones may be added in a solvent or other solvent. It is preferable to dissolve it in another sensitizer or peroxyester, or to warm it above its melting point, to disperse it well in a portion of the polyorganosiloxane, and then add it.
本発明の組成物は、上記したようなビニル基を含有する
ポリオルガノシロキサンとペルオキシエステルおよび増
感剤とから成っていて、紫外線を照射して硬化させるも
のである。使用される光源については特に制限されるも
のでないが、実用上には高圧水銀ランプが好適である。The composition of the present invention is composed of a vinyl group-containing polyorganosiloxane as described above, a peroxyester, and a sensitizer, and is cured by irradiation with ultraviolet rays. Although there are no particular restrictions on the light source used, a high-pressure mercury lamp is preferred in practice.
なお、硬化物の機械的強度をさらに向上させるために、
必要に応じて煙霧質シリカ、沈澱シ (リカ、焼成シ
リカ、シリカエアロゲルなどを加えても何らさしつかえ
ない。これらのシリカは単独で用いても2種以上を混合
して用いてもよく、また、そのまま用いても、表面をポ
リジメチルシロキサン、オクタメチルシクロテトラシロ
キサン、ヘキサメチルジシラザンのような有機ケイ素化
合物で処理して用いてもよい。In addition, in order to further improve the mechanical strength of the cured product,
If necessary, there is no problem in adding fumed silica, precipitated silica, calcined silica, silica aerogel, etc. These silicas may be used alone or in combination of two or more types, and It may be used as it is, or the surface may be treated with an organosilicon compound such as polydimethylsiloxane, octamethylcyclotetrasiloxane, or hexamethyldisilazane.
:発明の効果〕
本発明の組成物は、半導体の接合部を被覆保護したり、
ポツティングなどの方法で半導体装置の樹脂封止をした
りする半導体コーティング剤、または混成集積回路やプ
リント配線基板上に各種電気部品を実装するアッセンブ
リ工程において、部品の仮固定をする一時的固定材とし
て利用するのに好適である。そしてこれは塗布後、紫外
線照射までの間に長時間放置されても良好に硬化するた
めに、作業性において格段に改善され、かつ従来あった
不快臭も著しく改善されたものである。:Effects of the invention] The composition of the invention can coat and protect the joints of semiconductors,
As a semiconductor coating agent for resin-sealing semiconductor devices by methods such as potting, or as a temporary fixing material for temporarily fixing components in the assembly process of mounting various electrical components on hybrid integrated circuits and printed wiring boards. suitable for use. Since it cures well even if it is left for a long time after application and before irradiation with ultraviolet rays, the workability is significantly improved, and the unpleasant odor that was present in the past is also significantly reduced.
:実 施 例〕
以下、本発明を実施例により説明する。実施例中「部」
は全て重量部を示す。:Example] The present invention will be described below with reference to Examples. “Part” in Examples
All numbers indicate parts by weight.
実施例1
分子鎮両末端がトリメチルシリル基で封鎖され、メチル
ビニルシロキシ単位を8.0モル%含有する25℃にお
ける粘度が7.000cStのポリジメチルシロキサン
100部にtert−へキシルペルオキシベンゾエート
4部と50℃で融解させたベンゾフェノン1部とを加え
、万能混練機で均一に分散させて試料1とした。これを
テフロンコートしたステンレス基板上に0.2mm及び
2mmの厚さに塗布し、常温で所定時間放置した後、1
60W/cmのオゾン発生高圧水銀ランプ(ウシオ電機
社製UV−7000)でlQcmの距離から20秒間照
射したところ、すべて良好に硬化しゴム状となった。Example 1 4 parts of tert-hexylperoxybenzoate were added to 100 parts of polydimethylsiloxane, which has a viscosity of 7.000 cSt at 25°C and contains 8.0 mol% of methylvinylsiloxy units, with both terminal ends of the molecule being capped with trimethylsilyl groups. Sample 1 was prepared by adding 1 part of benzophenone melted at 50° C. and uniformly dispersing the mixture using a universal kneader. This was applied to a thickness of 0.2 mm and 2 mm on a Teflon-coated stainless steel substrate, and after being left at room temperature for a predetermined period of time,
When irradiated with a 60 W/cm ozone-generating high-pressure mercury lamp (UV-7000, manufactured by Ushio Inc.) from a distance of 1 Q cm for 20 seconds, all of the materials were well cured and became rubber-like.
塗布後、紫外線照射まで所定時間放置した場合の各々の
硬化性の測定結果を第1表に示した。Table 1 shows the measurement results of each curing property when the coating was left for a predetermined period of time before being irradiated with ultraviolet rays after coating.
比較例1
実施例1で用いたのと同じポリジメチルシロキサン10
0部に、tert−ブチルペルオキシベンゾエート4部
とベンゾフェノン1部を加え、万能混練機で均一に分散
させ試料2とした。これをテフロンコートしたステンレ
ス基板上に同じ< 0.2mmおよび2.0mmの厚さ
に塗布し、所定時間放置した後、実施例1と同様に紫外
線照射を行った結果は第1表に示したとおりであった。Comparative Example 1 The same polydimethylsiloxane 10 used in Example 1
Sample 2 was obtained by adding 4 parts of tert-butyl peroxybenzoate and 1 part of benzophenone to 0 parts and uniformly dispersing them using a universal kneader. This was applied on a Teflon-coated stainless steel substrate to the same thickness of <0.2 mm and 2.0 mm, and after being left for a predetermined time, UV irradiation was performed in the same manner as in Example 1. The results are shown in Table 1. That's right.
第 1 表
O:硬化性良好
△:深部硬化性不良
×:タックあり 硬化不良
実施例2
分子鎖両末端がジメチルビニルシロキシ基テ封鎖された
25℃における粘度が3.000cStのポリジメチル
シロキサン80部と煙霧質シリカ(アエロジル200、
日本アエロジル社製)の表面をヘキサメチルジシラザン
で処理した充填剤3部を万能混練機で均一に分散させた
。これに分子鎖両末端がトリメチルシロキシ基で封鎖さ
れ、メチルビニルシロキシ単位を10モル%含有する2
5℃における粘度が12.000cStのポリジメチル
シロキサン20部、tert−へキシルペルオキシベン
ゾエート4部とアセトフェノン1部を加え、均一に分散
させ、試料3とした。これをガラスエポキシ基板に銅配
線パターンとソルダーレジストコートしたプリント配線
基板上に、膜厚がそれぞれQ、 4mmおよび2.5m
mとなるように塗布し、48時間室温で放置した後、実
施例1と同様にして紫外線照射を行った。0.4mm厚
および2.5mm厚の両塗布部共塗布直後と全く同様に
良好に硬化し、ゴム状となった。そしてガラスエポキシ
基板、銅メツキ部およびソルダーレジストコート部にも
良好に接着することが確かめられた。Table 1 O: Good curability △: Poor deep curability ×: Tacked Poor curing Example 2 80 parts of polydimethylsiloxane with a viscosity of 3.000 cSt at 25°C, both ends of the molecular chain blocked with dimethylvinylsiloxy groups and fumed silica (Aerosil 200,
Three parts of a filler (manufactured by Nippon Aerosil Co., Ltd.) whose surface had been treated with hexamethyldisilazane were uniformly dispersed using a universal kneader. This contains 2, which has both molecular chain ends blocked with trimethylsiloxy groups and contains 10 mol% of methylvinylsiloxy units.
Sample 3 was prepared by adding 20 parts of polydimethylsiloxane having a viscosity of 12.000 cSt at 5°C, 4 parts of tert-hexylperoxybenzoate, and 1 part of acetophenone and uniformly dispersing them. This was placed on a printed wiring board made by coating a glass epoxy board with a copper wiring pattern and solder resist, with film thicknesses of Q, 4 mm, and 2.5 m, respectively.
m, and after being left at room temperature for 48 hours, ultraviolet ray irradiation was performed in the same manner as in Example 1. Both the 0.4 mm thick and 2.5 mm thick coated areas cured well and became rubber-like in exactly the same manner as immediately after coating. It was also confirmed that it adhered well to the glass epoxy substrate, copper plating parts, and solder resist coated parts.
比較例2
実施例2における試料3の組成のうち、ペルオキシエス
テルをtert−ブチルペルオキシエステルの同量で置
き換えたものを調製し、試料4とした。塗布後48時間
室温放置後実施例1と同様の条件で紫外線照射したとこ
ろ、0.4mm厚の薄膜部は全く硬化せずべとついた。Comparative Example 2 Sample 4 was prepared by replacing the peroxy ester with the same amount of tert-butyl peroxy ester in the composition of Sample 3 in Example 2. After being left at room temperature for 48 hours after coating, it was irradiated with ultraviolet rays under the same conditions as in Example 1, and the 0.4 mm thick thin film part did not harden at all and became sticky.
また、2.5mm厚の塗布部分は、表面はタックもなく
、良好に硬化しゴム状となったが、基板との界面部では
一部未硬化であったり、ゲル状であり、十分硬化しない
ことが確かめられた。In addition, the surface of the 2.5 mm thick coated area was well cured and rubber-like without any tackiness, but the interface with the substrate was partially uncured or gel-like and did not cure sufficiently. This was confirmed.
実施例3
分子鎖両末端がジメチルビニルシリル基で封鎖され、メ
チルフェニルシロキシ単位を3モル%含有する25℃に
おける粘度が6.000cStのポリジメチルシロキサ
ン60部に、表面をオクタメチルシクロテトラシロキサ
ンで処理した煙霧質シリカ9部を万能混練機で均一に分
散させた。これに、分子鎖両末端がトリメチルシリル基
で封鎮され、メチルビニルシロキシ単位ヲ30モル%含
有する25℃における粘度が7.000cStのポリジ
メチルシロキサン40部、tert−へキシルペルオキ
シベンゾエート5部、50℃で融解したベンゾフェノン
0.8部、2−ヒドロキシ−2−メチル−プロピオフェ
ノン(Darocurel 173. Merck社製
)0.4部およびポリエチレングリコール(ユニオック
スUS−5、日本油脂社製)0.2部を加え、均一に分
散させ試料5とした。これは流動性のないペースト状の
組成物で、紙−フェノール基板上に平均Q、5mm厚と
なるように塗布し、室温で72時間放置した後、タンタ
ル電解コンデンサの角型チップやり一ドレスセラミック
コンデンサの丸型チップを乗せ、実施例1の条件で紫外
線照射したところ、良好に硬化し、チップ部品を固定し
た。尚、硬化物はゴム状であり、基板およびチップ部品
と良好に接着した。Example 3 60 parts of polydimethylsiloxane, which has a viscosity of 6.000 cSt at 25°C and contains 3 mol% of methylphenylsiloxy units and whose molecular chain ends are capped with dimethylvinylsilyl groups, was coated with octamethylcyclotetrasiloxane on the surface. 9 parts of treated fumed silica were uniformly dispersed in a universal mixer. To this, 40 parts of polydimethylsiloxane with a viscosity of 7.000 cSt at 25°C containing 30 mol% of methylvinylsiloxy units and 5 parts of tert-hexylperoxybenzoate, 50 parts of tert-hexylperoxybenzoate, 0.8 part of benzophenone, 0.4 part of 2-hydroxy-2-methyl-propiophenone (Darocurel 173, manufactured by Merck) and 0.4 part of polyethylene glycol (UNIOX US-5, manufactured by NOF Corporation), melted at 0.01°C. Sample 5 was obtained by adding 2 parts and uniformly dispersing it. This is a paste-like composition with no fluidity. It is applied to a paper-phenol substrate to an average Q of 5 mm thickness, and after being left at room temperature for 72 hours, it is applied to a rectangular chip of a tantalum electrolytic capacitor or a dress ceramic. When a round chip of a capacitor was placed on it and irradiated with ultraviolet rays under the conditions of Example 1, it was well cured and the chip component was fixed. The cured product was rubber-like and adhered well to the substrate and chip components.
比較例3
実施例3の試料5のペルオキシエステルをtert−ブ
チルペルオキシベンゾエートに置き換え、ベンゾフェノ
ンおよび2−ヒドロキシ−2−メチル−プロピオフェノ
ンを除いた組成物を調製し、試料6とした。これを紙フ
エノール基板上にQ、 5mm厚で塗布したものを72
時間室温で放置したものに、実施例3のチップ部品をの
せ実施例1の条件で紫外線照射したところ、全く硬化せ
ずべたつくだけでチップ部品を固定するに至らなかった
。Comparative Example 3 A composition was prepared as Sample 6 by replacing the peroxyester of Sample 5 of Example 3 with tert-butyl peroxybenzoate and excluding benzophenone and 2-hydroxy-2-methyl-propiophenone. This was coated on a paper phenol substrate with a thickness of 5mm.
When the chip component of Example 3 was placed on a product that had been left at room temperature for an hour and irradiated with ultraviolet rays under the conditions of Example 1, the chip component was not cured at all and only became sticky, unable to fix the chip component.
実施例4
分子鎮両末端がジメチルビニルシリル基で封鎖され、メ
チルフェニルシロキシ単位を5モル%含有する25℃に
おける粘度が1.000cStのジメチルポリシロキサ
ン50部に表面をヘキサメチルジシラザンで処理した煙
霧質シリカ8部を万能混線機で均一に分散させた。これ
に平均組成でトリメチルシロキシ基2.7モル%、ジメ
チルビニルシロキシ基1.3モル%、ビニルメチルシロ
キシ基0.4モル%、シリケート基(SiO□)3,6
モル%およびジメチルシロキシ基92モル%より成るポ
リオルガノシロキサン50部を均一になるように加えた
。更にtert−オクチルペルオキシベンゾエート4部
、ベンゾフェノン1部および実施例3で用いたポリエチ
レングリコール0.15部を加え、試料7を調製した。Example 4 50 parts of dimethylpolysiloxane having a viscosity of 1.000 cSt at 25°C and containing 5 mol% of methylphenylsiloxy units and having both terminal ends of the molecule blocked with dimethylvinylsilyl groups was treated with hexamethyldisilazane on its surface. Eight parts of fumed silica were uniformly dispersed using a universal mixer. In addition, the average composition is 2.7 mol% of trimethylsiloxy groups, 1.3 mol% of dimethylvinylsiloxy groups, 0.4 mol% of vinylmethylsiloxy groups, and 3.6 mol% of silicate groups (SiO□).
50 parts of a polyorganosiloxane consisting of 92 mole % of dimethylsiloxy groups were added uniformly. Furthermore, 4 parts of tert-octylperoxybenzoate, 1 part of benzophenone, and 0.15 part of the polyethylene glycol used in Example 3 were added to prepare Sample 7.
これをガラスエポキシ基板にQ、 4mm厚に塗布し、
72時間後に実施例1に準じて紫外線照射したところ、
良好に硬化してエラストマーとなった。ガラスエポキシ
基板へも良好に接着した。Coat this on a glass epoxy board to a thickness of 4 mm.
After 72 hours, ultraviolet rays were irradiated according to Example 1.
It cured well and became an elastomer. It also adhered well to glass epoxy substrates.
比較例4
実施例4で調製したベースコンパウンドにペルオキシエ
ステルおよびベンゾフェノンに代えて、ジアルキルパー
オキサイドの2,5−ジメチル−2,5−ジ(tert
−ブチルペルオキシ)ヘキシン−3を4部加えて均一に
分散させ試料8とした。これをガラスエポキシ基板上に
0.4mm厚で塗布し、48時間放置したところ、実施
例1の条件による紫外線照射で硬化しなかった。Comparative Example 4 The dialkyl peroxide 2,5-dimethyl-2,5-di(tert) was added to the base compound prepared in Example 4 in place of the peroxyester and benzophenone.
Sample 8 was prepared by adding 4 parts of (butylperoxy)hexyne-3 and uniformly dispersing the mixture. When this was coated on a glass epoxy substrate to a thickness of 0.4 mm and left for 48 hours, it was not cured by ultraviolet irradiation under the conditions of Example 1.
参考例
試料1. 3. 5. 7及び2. 4. 6を紫外線
照射前後において臭いを比較した。10人のモニターに
より、臭いが不快とするものをC9やや不快であるもの
をB、あまり気にならないものをAとして調査した結果
を第2表に示した。本発明による実施例で不快臭が改善
されていることが認められた。Reference example sample 1. 3. 5. 7 and 2. 4. The odor of Sample No. 6 was compared before and after UV irradiation. Table 2 shows the results of a survey conducted by 10 monitors, with unpleasant odors marked as C9, slightly unpleasant as B, and not so unpleasant as A. It was observed that unpleasant odor was improved in the examples according to the present invention.
Claims (1)
価の炭化水素基を表し、aは0.01≦a≦1、bは0
≦b<3、(a+b)は1≦a+b≦3である)で表さ
れるポリオルガノシロキサン100重量部、 (B)一般式 R^2−O−O−C−O−R^3 (式中、R”は炭素数が5〜12である置換または非置
換の1価の脂肪族炭化水素基、R^3は置換または非置
換の1価の芳香族炭化水素基を表す)で表されるペルオ
キシエステル0.1〜10.0重量部、 および (C)増感剤0.01〜5.0重量部 から成ることを特徴とする紫外線硬化型ポリオルガノシ
ロキサン組成物。 2 (A)のポリオルガノシロキサンが25℃において
、100cSt以上の粘度を有する特許請求の範囲第1
項記載のポリオルガノシロキサン組成物。 3 R^1がメチル基またはフェニル基である特許請求
の範囲第1項記載のポリオルガノシロキサン組成物。 4 R^2がtert−ヘキシル基又はtert−オク
チル基である特許請求の範囲第1項記載のポリオルガノ
シロキサン組成物。 5 (B)のペルオキシエステルが、tert−ヘキシ
ルペルオキシベンゾエート又はtert−オクチルペル
オキシベンゾエートである特許請求の範囲第1項記載の
ポリオルガノシロキサン組成物。 6 (C)の増感剤がケトン類である特許請求の範囲第
1項記載のポリオルガノシロキサン組成物。 7 (C)の増感剤がアセトフェノン、プロピオフェノ
ン、ベンゾフェノン、ベンジル、ベンゾイルおよびそれ
らの誘導体から選ばれる1種又は2種以上である特許請
求の範囲第1項記載のポリオルガノシロキサン組成物。[Claims] 1 (A) Average composition formula ▲ Numerical formula, chemical formula, table, etc. ▼ (In the formula, R^1 is substituted or unsubstituted 1 excluding vinyl group)
represents a valent hydrocarbon group, a is 0.01≦a≦1, b is 0
100 parts by weight of a polyorganosiloxane represented by (B) the general formula R^2-O-O-C-O-R^3 (formula where R'' is a substituted or unsubstituted monovalent aliphatic hydrocarbon group having 5 to 12 carbon atoms, and R^3 is a substituted or unsubstituted monovalent aromatic hydrocarbon group. An ultraviolet curable polyorganosiloxane composition characterized by comprising 0.1 to 10.0 parts by weight of a peroxyester and (C) 0.01 to 5.0 parts by weight of a sensitizer. Claim 1: The polyorganosiloxane has a viscosity of 100 cSt or more at 25°C.
The polyorganosiloxane composition described in . 3. The polyorganosiloxane composition according to claim 1, wherein R^1 is a methyl group or a phenyl group. 4. The polyorganosiloxane composition according to claim 1, wherein R^2 is a tert-hexyl group or a tert-octyl group. 5. The polyorganosiloxane composition according to claim 1, wherein the peroxyester (B) is tert-hexyl peroxybenzoate or tert-octyl peroxybenzoate. 6. The polyorganosiloxane composition according to claim 1, wherein the sensitizer (C) is a ketone. 7. The polyorganosiloxane composition according to claim 1, wherein the sensitizer (C) is one or more selected from acetophenone, propiophenone, benzophenone, benzyl, benzoyl, and derivatives thereof.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62284444A JPH0794521B2 (en) | 1987-11-11 | 1987-11-11 | UV curable polyorganosiloxane composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62284444A JPH0794521B2 (en) | 1987-11-11 | 1987-11-11 | UV curable polyorganosiloxane composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01126317A true JPH01126317A (en) | 1989-05-18 |
JPH0794521B2 JPH0794521B2 (en) | 1995-10-11 |
Family
ID=17678621
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62284444A Expired - Fee Related JPH0794521B2 (en) | 1987-11-11 | 1987-11-11 | UV curable polyorganosiloxane composition |
Country Status (1)
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JP (1) | JPH0794521B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013224347A (en) * | 2012-04-20 | 2013-10-31 | Shin-Etsu Chemical Co Ltd | Ultraviolet curing property silicone rubber composition, silicone rubber molded material, and method of manufacturing the same |
JP2014098068A (en) * | 2012-11-13 | 2014-05-29 | Shin Etsu Chem Co Ltd | Silicone rubber composition and silicone rubber molded product and method for producing the same |
WO2016103654A1 (en) * | 2014-12-26 | 2016-06-30 | 東レ・ダウコーニング株式会社 | Curable organopolysiloxane composition, semiconductor sealant comprising same, and semiconductor device |
KR20200034356A (en) | 2018-09-21 | 2020-03-31 | 주식회사 케이씨씨 | Silicone Composition |
-
1987
- 1987-11-11 JP JP62284444A patent/JPH0794521B2/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013224347A (en) * | 2012-04-20 | 2013-10-31 | Shin-Etsu Chemical Co Ltd | Ultraviolet curing property silicone rubber composition, silicone rubber molded material, and method of manufacturing the same |
JP2014098068A (en) * | 2012-11-13 | 2014-05-29 | Shin Etsu Chem Co Ltd | Silicone rubber composition and silicone rubber molded product and method for producing the same |
WO2016103654A1 (en) * | 2014-12-26 | 2016-06-30 | 東レ・ダウコーニング株式会社 | Curable organopolysiloxane composition, semiconductor sealant comprising same, and semiconductor device |
CN107207859A (en) * | 2014-12-26 | 2017-09-26 | 道康宁东丽株式会社 | Curable organopolysiloxane composition, the semiconductor sealant and semiconductor device being made up of said composition |
US10604612B2 (en) | 2014-12-26 | 2020-03-31 | Dow Toray Co., Ltd. | Curable organopolysiloxane composition, semiconductor sealant comprising same, and semiconductor device |
KR20200034356A (en) | 2018-09-21 | 2020-03-31 | 주식회사 케이씨씨 | Silicone Composition |
Also Published As
Publication number | Publication date |
---|---|
JPH0794521B2 (en) | 1995-10-11 |
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