JPH01125534U - - Google Patents

Info

Publication number

JPH01125534U

JPH01125534U JP2019988U JP2019988U JPH01125534U JP H01125534 U JPH01125534 U JP H01125534U JP 2019988 U JP2019988 U JP 2019988U JP 2019988 U JP2019988 U JP 2019988U JP H01125534 U JPH01125534 U JP H01125534U

Authority

JP

Japan

Prior art keywords

cleaning

semiconductor devices

room

chemical solution

semiconductor

Prior art date

1988-02-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000126 substance Substances 0.000 claims description 7
• 238000001816 cooling Methods 0.000 claims description 2
• 238000010992 reflux Methods 0.000 claims description 2
• 238000004140 cleaning Methods 0.000 claims 7
• 239000004065 semiconductor Substances 0.000 claims 5
• 230000032258 transport Effects 0.000 claims 2
• 229910052783 alkali metal Inorganic materials 0.000 claims 1
• 150000001340 alkali metals Chemical class 0.000 claims 1
• 238000001704 evaporation Methods 0.000 claims 1
• 229910001385 heavy metal Inorganic materials 0.000 claims 1
• 239000012535 impurity Substances 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 claims 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000005406 washing Methods 0.000 description 1