JPH01125533U - - Google Patents

Info

Publication number
JPH01125533U
JPH01125533U JP2202488U JP2202488U JPH01125533U JP H01125533 U JPH01125533 U JP H01125533U JP 2202488 U JP2202488 U JP 2202488U JP 2202488 U JP2202488 U JP 2202488U JP H01125533 U JPH01125533 U JP H01125533U
Authority
JP
Japan
Prior art keywords
laser
exposure
transfer plate
isolates
heat transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2202488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0755009Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988022024U priority Critical patent/JPH0755009Y2/ja
Publication of JPH01125533U publication Critical patent/JPH01125533U/ja
Application granted granted Critical
Publication of JPH0755009Y2 publication Critical patent/JPH0755009Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988022024U 1988-02-22 1988-02-22 干渉露光装置 Expired - Lifetime JPH0755009Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988022024U JPH0755009Y2 (ja) 1988-02-22 1988-02-22 干渉露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988022024U JPH0755009Y2 (ja) 1988-02-22 1988-02-22 干渉露光装置

Publications (2)

Publication Number Publication Date
JPH01125533U true JPH01125533U (enExample) 1989-08-28
JPH0755009Y2 JPH0755009Y2 (ja) 1995-12-18

Family

ID=31239771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988022024U Expired - Lifetime JPH0755009Y2 (ja) 1988-02-22 1988-02-22 干渉露光装置

Country Status (1)

Country Link
JP (1) JPH0755009Y2 (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57176721A (en) * 1981-04-22 1982-10-30 Agency Of Ind Science & Technol Contraction projecting and exposing device using optical fiber
JPS5864080A (ja) * 1981-10-14 1983-04-16 Komatsu Ltd ガスレ−ザ装置の熱交換器
JPS58155783A (ja) * 1982-03-11 1983-09-16 Mitsubishi Electric Corp ガスレ−ザ−装置
JPS6112695U (ja) * 1984-06-28 1986-01-24 富士通株式会社 ロボツトフインガ−

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57176721A (en) * 1981-04-22 1982-10-30 Agency Of Ind Science & Technol Contraction projecting and exposing device using optical fiber
JPS5864080A (ja) * 1981-10-14 1983-04-16 Komatsu Ltd ガスレ−ザ装置の熱交換器
JPS58155783A (ja) * 1982-03-11 1983-09-16 Mitsubishi Electric Corp ガスレ−ザ−装置
JPS6112695U (ja) * 1984-06-28 1986-01-24 富士通株式会社 ロボツトフインガ−

Also Published As

Publication number Publication date
JPH0755009Y2 (ja) 1995-12-18

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