JPH01125533U - - Google Patents
Info
- Publication number
- JPH01125533U JPH01125533U JP2202488U JP2202488U JPH01125533U JP H01125533 U JPH01125533 U JP H01125533U JP 2202488 U JP2202488 U JP 2202488U JP 2202488 U JP2202488 U JP 2202488U JP H01125533 U JPH01125533 U JP H01125533U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- exposure
- transfer plate
- isolates
- heat transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002826 coolant Substances 0.000 claims 1
- 238000000960 laser cooling Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988022024U JPH0755009Y2 (ja) | 1988-02-22 | 1988-02-22 | 干渉露光装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988022024U JPH0755009Y2 (ja) | 1988-02-22 | 1988-02-22 | 干渉露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01125533U true JPH01125533U (enrdf_load_stackoverflow) | 1989-08-28 |
JPH0755009Y2 JPH0755009Y2 (ja) | 1995-12-18 |
Family
ID=31239771
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988022024U Expired - Lifetime JPH0755009Y2 (ja) | 1988-02-22 | 1988-02-22 | 干渉露光装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0755009Y2 (enrdf_load_stackoverflow) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57176721A (en) * | 1981-04-22 | 1982-10-30 | Agency Of Ind Science & Technol | Contraction projecting and exposing device using optical fiber |
JPS5864080A (ja) * | 1981-10-14 | 1983-04-16 | Komatsu Ltd | ガスレ−ザ装置の熱交換器 |
JPS58155783A (ja) * | 1982-03-11 | 1983-09-16 | Mitsubishi Electric Corp | ガスレ−ザ−装置 |
JPS6112695U (ja) * | 1984-06-28 | 1986-01-24 | 富士通株式会社 | ロボツトフインガ− |
-
1988
- 1988-02-22 JP JP1988022024U patent/JPH0755009Y2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57176721A (en) * | 1981-04-22 | 1982-10-30 | Agency Of Ind Science & Technol | Contraction projecting and exposing device using optical fiber |
JPS5864080A (ja) * | 1981-10-14 | 1983-04-16 | Komatsu Ltd | ガスレ−ザ装置の熱交換器 |
JPS58155783A (ja) * | 1982-03-11 | 1983-09-16 | Mitsubishi Electric Corp | ガスレ−ザ−装置 |
JPS6112695U (ja) * | 1984-06-28 | 1986-01-24 | 富士通株式会社 | ロボツトフインガ− |
Also Published As
Publication number | Publication date |
---|---|
JPH0755009Y2 (ja) | 1995-12-18 |