JPH01125531U - - Google Patents

Info

Publication number

JPH01125531U

JPH01125531U JP2137088U JP2137088U JPH01125531U JP H01125531 U JPH01125531 U JP H01125531U JP 2137088 U JP2137088 U JP 2137088U JP 2137088 U JP2137088 U JP 2137088U JP H01125531 U JPH01125531 U JP H01125531U

Authority

JP

Japan

Prior art keywords

impurity diffusion

diffusion layer

semiconductor device

coating film

subjecting

Prior art date

1988-02-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000012535 impurity Substances 0.000 claims description 10
• 238000009792 diffusion process Methods 0.000 claims description 9
• 239000004065 semiconductor Substances 0.000 claims description 6
• 239000011248 coating agent Substances 0.000 claims description 3
• 238000000576 coating method Methods 0.000 claims description 3
• 238000010438 heat treatment Methods 0.000 claims 1
• 239000007790 solid phase Substances 0.000 claims 1
• 238000000034 method Methods 0.000 description 1
• 125000006850 spacer group Chemical group 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1