JPH01125441U - - Google Patents
Info
- Publication number
- JPH01125441U JPH01125441U JP1988019286U JP1928688U JPH01125441U JP H01125441 U JPH01125441 U JP H01125441U JP 1988019286 U JP1988019286 U JP 1988019286U JP 1928688 U JP1928688 U JP 1928688U JP H01125441 U JPH01125441 U JP H01125441U
- Authority
- JP
- Japan
- Prior art keywords
- light
- photomask
- photoresist film
- transmitting region
- shielding film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988019286U JPH01125441U (en, 2012) | 1988-02-18 | 1988-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988019286U JPH01125441U (en, 2012) | 1988-02-18 | 1988-02-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125441U true JPH01125441U (en, 2012) | 1989-08-28 |
Family
ID=31234661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988019286U Pending JPH01125441U (en, 2012) | 1988-02-18 | 1988-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125441U (en, 2012) |
-
1988
- 1988-02-18 JP JP1988019286U patent/JPH01125441U/ja active Pending