JPH01125439U - - Google Patents
Info
- Publication number
- JPH01125439U JPH01125439U JP2013588U JP2013588U JPH01125439U JP H01125439 U JPH01125439 U JP H01125439U JP 2013588 U JP2013588 U JP 2013588U JP 2013588 U JP2013588 U JP 2013588U JP H01125439 U JPH01125439 U JP H01125439U
- Authority
- JP
- Japan
- Prior art keywords
- film
- photomask
- chromium
- light
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 229910000423 chromium oxide Inorganic materials 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013588U JPH01125439U (da) | 1988-02-17 | 1988-02-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013588U JPH01125439U (da) | 1988-02-17 | 1988-02-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01125439U true JPH01125439U (da) | 1989-08-28 |
Family
ID=31236248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013588U Pending JPH01125439U (da) | 1988-02-17 | 1988-02-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01125439U (da) |
-
1988
- 1988-02-17 JP JP2013588U patent/JPH01125439U/ja active Pending