JPH01125364U - - Google Patents
Info
- Publication number
- JPH01125364U JPH01125364U JP2194188U JP2194188U JPH01125364U JP H01125364 U JPH01125364 U JP H01125364U JP 2194188 U JP2194188 U JP 2194188U JP 2194188 U JP2194188 U JP 2194188U JP H01125364 U JPH01125364 U JP H01125364U
- Authority
- JP
- Japan
- Prior art keywords
- protrusion
- electrode body
- reactor
- parallel plate
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2194188U JPH01125364U (enExample) | 1988-02-22 | 1988-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2194188U JPH01125364U (enExample) | 1988-02-22 | 1988-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125364U true JPH01125364U (enExample) | 1989-08-25 |
Family
ID=31239613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2194188U Pending JPH01125364U (enExample) | 1988-02-22 | 1988-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125364U (enExample) |
-
1988
- 1988-02-22 JP JP2194188U patent/JPH01125364U/ja active Pending