JPH01125364U - - Google Patents

Info

Publication number
JPH01125364U
JPH01125364U JP2194188U JP2194188U JPH01125364U JP H01125364 U JPH01125364 U JP H01125364U JP 2194188 U JP2194188 U JP 2194188U JP 2194188 U JP2194188 U JP 2194188U JP H01125364 U JPH01125364 U JP H01125364U
Authority
JP
Japan
Prior art keywords
protrusion
electrode body
reactor
parallel plate
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2194188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2194188U priority Critical patent/JPH01125364U/ja
Publication of JPH01125364U publication Critical patent/JPH01125364U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP2194188U 1988-02-22 1988-02-22 Pending JPH01125364U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2194188U JPH01125364U (enrdf_load_stackoverflow) 1988-02-22 1988-02-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2194188U JPH01125364U (enrdf_load_stackoverflow) 1988-02-22 1988-02-22

Publications (1)

Publication Number Publication Date
JPH01125364U true JPH01125364U (enrdf_load_stackoverflow) 1989-08-25

Family

ID=31239613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2194188U Pending JPH01125364U (enrdf_load_stackoverflow) 1988-02-22 1988-02-22

Country Status (1)

Country Link
JP (1) JPH01125364U (enrdf_load_stackoverflow)

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