JPH01125361U - - Google Patents
Info
- Publication number
- JPH01125361U JPH01125361U JP2196988U JP2196988U JPH01125361U JP H01125361 U JPH01125361 U JP H01125361U JP 2196988 U JP2196988 U JP 2196988U JP 2196988 U JP2196988 U JP 2196988U JP H01125361 U JPH01125361 U JP H01125361U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- hands
- holding device
- sample holding
- rotation axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2196988U JPH01125361U (hu) | 1988-02-22 | 1988-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2196988U JPH01125361U (hu) | 1988-02-22 | 1988-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125361U true JPH01125361U (hu) | 1989-08-25 |
Family
ID=31239666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2196988U Pending JPH01125361U (hu) | 1988-02-22 | 1988-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125361U (hu) |
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1988
- 1988-02-22 JP JP2196988U patent/JPH01125361U/ja active Pending