JPH01125356U - - Google Patents

Info

Publication number

JPH01125356U

JPH01125356U JP2167288U JP2167288U JPH01125356U JP H01125356 U JPH01125356 U JP H01125356U JP 2167288 U JP2167288 U JP 2167288U JP 2167288 U JP2167288 U JP 2167288U JP H01125356 U JPH01125356 U JP H01125356U

Authority

JP

Japan

Prior art keywords

chamber

thin film

forming apparatus

wall

film forming

Prior art date

1988-02-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 5
• 239000010409 thin film Substances 0.000 claims 3
• 238000001816 cooling Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000004544 sputter deposition Methods 0.000 description 2
• 238000005477 sputtering target Methods 0.000 description 1