JPH01124480U - - Google Patents
Info
- Publication number
- JPH01124480U JPH01124480U JP2084088U JP2084088U JPH01124480U JP H01124480 U JPH01124480 U JP H01124480U JP 2084088 U JP2084088 U JP 2084088U JP 2084088 U JP2084088 U JP 2084088U JP H01124480 U JPH01124480 U JP H01124480U
- Authority
- JP
- Japan
- Prior art keywords
- piston
- valve
- piston rod
- stroke
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Fluid-Driven Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2084088U JPH0435651Y2 (is) | 1988-02-19 | 1988-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2084088U JPH0435651Y2 (is) | 1988-02-19 | 1988-02-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01124480U true JPH01124480U (is) | 1989-08-24 |
| JPH0435651Y2 JPH0435651Y2 (is) | 1992-08-24 |
Family
ID=31237549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2084088U Expired JPH0435651Y2 (is) | 1988-02-19 | 1988-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0435651Y2 (is) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001193845A (ja) * | 2000-01-06 | 2001-07-17 | Smc Corp | ２ポート弁 |
| JPWO2020158573A1 (ja) * | 2019-01-31 | 2021-12-09 | 株式会社フジキン | バルブ装置、流量制御方法、流体制御装置、半導体製造方法、および半導体製造装置 |
-
1988
- 1988-02-19 JP JP2084088U patent/JPH0435651Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001193845A (ja) * | 2000-01-06 | 2001-07-17 | Smc Corp | ２ポート弁 |
| JPWO2020158573A1 (ja) * | 2019-01-31 | 2021-12-09 | 株式会社フジキン | バルブ装置、流量制御方法、流体制御装置、半導体製造方法、および半導体製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0435651Y2 (is) | 1992-08-24 |