JPH01124281U - - Google Patents
Info
- Publication number
- JPH01124281U JPH01124281U JP2103288U JP2103288U JPH01124281U JP H01124281 U JPH01124281 U JP H01124281U JP 2103288 U JP2103288 U JP 2103288U JP 2103288 U JP2103288 U JP 2103288U JP H01124281 U JPH01124281 U JP H01124281U
- Authority
- JP
- Japan
- Prior art keywords
- entering
- clean air
- removal device
- semiconductor manufacturing
- dust removal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2103288U JPH01124281U (cs) | 1988-02-19 | 1988-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2103288U JPH01124281U (cs) | 1988-02-19 | 1988-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01124281U true JPH01124281U (cs) | 1989-08-24 |
Family
ID=31237903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2103288U Pending JPH01124281U (cs) | 1988-02-19 | 1988-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01124281U (cs) |
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1988
- 1988-02-19 JP JP2103288U patent/JPH01124281U/ja active Pending