JPH01123955A - Suction exhaust device for cryogenic refrigerator - Google Patents

Suction exhaust device for cryogenic refrigerator

Info

Publication number
JPH01123955A
JPH01123955A JP28361087A JP28361087A JPH01123955A JP H01123955 A JPH01123955 A JP H01123955A JP 28361087 A JP28361087 A JP 28361087A JP 28361087 A JP28361087 A JP 28361087A JP H01123955 A JPH01123955 A JP H01123955A
Authority
JP
Japan
Prior art keywords
slide valve
pressure line
valve seat
valve body
communication hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28361087A
Other languages
Japanese (ja)
Inventor
Kazuo Nomura
野村 和雄
Tokuji Nishiba
西場 徳二
Isao Shizawa
始澤 勇夫
Katsuji Yoshikawa
勝治 吉川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP28361087A priority Critical patent/JPH01123955A/en
Publication of JPH01123955A publication Critical patent/JPH01123955A/en
Pending legal-status Critical Current

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  • Multiple-Way Valves (AREA)

Abstract

PURPOSE: To improve the sealing characteristic of a slide valve disk and a valve seat and reduce leakage from the slide valve disk by providing pressing means for pressing the valve seat to the slide valve disk side on the surface of the valve seat housed in a hollow guide box opposite to the slide valve disk. CONSTITUTION: An air supply and exhaust device 13 comprises a hollow 16 guide box 17, a valve seat 18 housed in the guide box and a slide valve disk 19 sliding in a reciprocating manner while coming into contact with the valve seat. On the surface of the valve seat 18 opposite to the slide valve disk 19, is formed a pressure bearing surface 25 for receiving refrigerant pressure from the high pressure line 2 of a compressor 1. The valve seat 18 in contact with the slide valve disk 19 receives pressure from the high pressure line 2 on the pressure bearing surface 25 formed on the surface of valve seat 18 opposite to the slide valve disk 19, so that it is pressed to the slide valve disk 19 due to the pressure difference between valve seat and the hollow part 16 of the guide box 17 communicating with the low pressure line 3 of the compressor 1. Thus, the leakage of refrigerant from the recessed part 23 of the slide valve disk to the hollow part 16 is prevented.

Description

【発明の詳細な説明】 ビ)産業上の利用分野 この発明はギフオードマクマホンサイクル、ソルベーサ
イクル等のガスサイクルを備えた極低温用冷凍機の給排
気装置の改良に関する。
DETAILED DESCRIPTION OF THE INVENTION B) Industrial Application Field This invention relates to an improvement in the supply and exhaust system of a cryogenic refrigerator equipped with a gas cycle such as a Gifford-McMahon cycle or a Solvay cycle.

(ロ)従来の技術 従来のこの種の極低温用冷凍機は「真空技術マニュアル
」(昭和58年7月30日産業図書株式会社発行、P2
20)に開示されているように(第5図参照)、シリン
ダ50と、このシリンダ内を上下に往復動するディスプ
レーサ51と、このディスプレーサによってシリンダ5
0内部に区画形成されるバッファー空間52及び膨張空
間53と、ディスプレーサ51に貫設され、バッファー
空間52及び膨張空間53を連絡するガス流路54と、
このガス流路に配設された蓄熱材55と、ヘリウムガス
等の作動ガスの圧縮を行なう圧縮装置56と、シリンダ
5oの給排気口57を圧縮装置56の高圧ライン58と
低圧ライン59とに交互に連通させる給排気装置6oと
を備え、この給排気装置には給気弁61と、排気弁62
とが使用されている。また、シリンダ5oのコールドヘ
ッド63には熱伝達部材64を介して負荷65が接続さ
れている。
(b) Conventional technology Conventional cryogenic refrigerators of this type are described in the "Vacuum Technology Manual" (published by Sangyo Tosho Co., Ltd., July 30, 1981, p. 2).
20) (see FIG. 5), a cylinder 50, a displacer 51 that reciprocates up and down within the cylinder, and a displacer 51 that moves the cylinder 50 up and down.
a buffer space 52 and an expansion space 53 that are defined inside the displacer 51;
A heat storage material 55 disposed in this gas flow path, a compression device 56 that compresses a working gas such as helium gas, and an air supply/exhaust port 57 of the cylinder 5o are connected to a high pressure line 58 and a low pressure line 59 of the compression device 56. It is equipped with an air supply/exhaust device 6o which is communicated alternately, and this air supply/exhaust device includes an air supply valve 61 and an exhaust valve 62.
is used. Further, a load 65 is connected to the cold head 63 of the cylinder 5o via a heat transfer member 64.

上述した極低温用冷凍機はディスプレーサ51がシリン
ダ50内の最下位(上死点)にあるとき。
In the cryogenic refrigerator described above, when the displacer 51 is at the lowest position (top dead center) in the cylinder 50.

給気弁61を開、排気弁62を閉とし、圧縮装置56で
加圧された作動ガスをバッファー空間52に流入させる
。そして、ディスプレーサ51がシリンダ50内の最下
位がら最上位(下死点)へ移動する過程ではバッファー
空間52の作動ガスをガス流路54の蓄熱材55で冷却
させながら、膨張空間53に流入させる。また、ディス
プレーサ51の移動に伴って膨張空間53の容積が増大
していく。ディスプレーサ51がシリンダ5o内の最上
位にあるとき、給気弁61を閉にするとともに、排気弁
62を開にする。このため、膨張空間53では作動ガス
が膨張して寒冷が発生する。その後、ディスプレーサ5
1が最上位から最下位へ移動する過程では膨張空間53
の作動ガスが蓄熱材55を冷却しながらガス流路54を
流れ、さらにバッファー空間52及び排気弁62を通っ
て低圧ライン59に排気される。以上の繰返しにより。
The air supply valve 61 is opened, the exhaust valve 62 is closed, and the working gas pressurized by the compression device 56 is caused to flow into the buffer space 52. In the process in which the displacer 51 moves from the lowest position to the highest position (bottom dead center) in the cylinder 50, the working gas in the buffer space 52 is cooled by the heat storage material 55 in the gas flow path 54 and flows into the expansion space 53. . Furthermore, as the displacer 51 moves, the volume of the expansion space 53 increases. When the displacer 51 is at the uppermost position in the cylinder 5o, the air supply valve 61 is closed and the exhaust valve 62 is opened. Therefore, the working gas expands in the expansion space 53, generating cold. After that, displacer 5
In the process of 1 moving from the top to the bottom, the expansion space 53
The working gas flows through the gas passage 54 while cooling the heat storage material 55, and is further exhausted to the low pressure line 59 through the buffer space 52 and the exhaust valve 62. By repeating the above.

シリンダ50のコールドヘッド63が冷却され、負荷6
5に極低温の寒冷を与える。
The cold head 63 of the cylinder 50 is cooled and the load 6
5 is subjected to cryogenic cold.

(ハ)発明が解決しようとする問題点 上述した極低温用冷凍機では給排気装置6oの給気弁6
1及び排気弁62に2個のポペット弁が多く使用されて
いる。しかしながら、2個のポペット弁を使用する方式
では構造が複雑になり、部品点数が多(、給排気装置が
大型になるなどの欠点があった。
(c) Problems to be Solved by the Invention In the cryogenic refrigerator described above, the air supply valve 6 of the air supply/exhaust device 6o
Two poppet valves are often used for the exhaust valve 1 and the exhaust valve 62. However, the system using two poppet valves had drawbacks such as a complicated structure, a large number of parts, and a large air supply and exhaust system.

また、特開昭60−213777号公報に開示されてい
るように、1個のスプール弁を用いた給排気装置により
作動ガスの給排気を行なわせる場合、スプール弁体の外
周面とスプール弁体を往復動自在に受容する円筒状スリ
ーブの内周面との接触によりシールを行なうことから1
作動ガスの漏れに対する抵抗力が弱(、冷凍機の効率が
低下する問題があった。
Further, as disclosed in Japanese Patent Application Laid-open No. 60-213777, when supplying and exhausting working gas is performed by a supply and exhaust device using one spool valve, the outer peripheral surface of the spool valve body and the spool valve body 1. Since sealing is performed by contacting the inner peripheral surface of the cylindrical sleeve that reciprocally receives the
Weak resistance to leakage of working gas (there was a problem that the efficiency of the refrigerator decreased).

さらにまた、特開昭60−138369号公報に開示さ
れているようなロータリーパルプを用いる給排気装置で
は弁体の移動距離が長(、弁体を作動させるのに大きな
動力が必要となる欠点があった。
Furthermore, the air supply and exhaust system using rotary pulp as disclosed in Japanese Patent Application Laid-Open No. 60-138369 has the disadvantage that the valve body has a long travel distance (and a large amount of power is required to operate the valve body). there were.

この発明は上述した事実に鑑みてなされたものであり1
作動ガスの漏れを少な(シ、冷凍機効率の向上を図ると
ともに、コンパクトで、動力の小さい極低温用冷凍機の
給排気装置を提供することを目的とする。
This invention was made in view of the above-mentioned facts.1
The purpose of the present invention is to provide a supply/exhaust device for a cryogenic refrigerator that is compact and requires little power, while reducing leakage of working gas and improving refrigerator efficiency.

に)問題点を解決するための手段 この発明は給排気装置を中空の案内箱と、この案内箱内
に収納された弁座と、この弁座に接触しながら往復摺動
するスライド弁体とで構成し、この弁座にシリンダの給
排気口に連通ずる給排気連絡孔と圧縮装置の高圧ライン
に連通ずる高圧ライン連絡孔とを設け、がっ、案内箱に
圧縮装置の低圧ラインに連通ずる低圧ライン連絡孔を設
け、スライド弁体に給排気口連絡孔と高圧ライン連絡孔
とを連通させる凹所を設け5前記弁座のスライド弁体と
反対側の面にこのスライド弁体側に弁座を押圧する抑圧
手段を設けたものである。
B) Means for Solving the Problems This invention provides an air supply and exhaust system with a hollow guide box, a valve seat housed in the guide box, and a slide valve body that slides back and forth while contacting the valve seat. The valve seat is provided with an air supply/exhaust communication hole that communicates with the air supply/exhaust port of the cylinder, and a high-pressure line communication hole that communicates with the high-pressure line of the compression device. A low-pressure line communication hole is provided in the slide valve body, and a recess is provided in the slide valve body to communicate the supply/exhaust port communication hole with the high-pressure line communication hole. It is equipped with a suppressing means for pressing the seat.

(ホ)作用 この発明は上記のように構成したことにより。(e) Effect This invention is configured as described above.

押圧手段で弁座をスライド弁体に押圧し、このスライド
弁体と弁座とのシール性を向上させ、スライド弁体から
のリークを減少させるようにしたものである。
The valve seat is pressed against the slide valve element by a pressing means to improve the sealing performance between the slide valve element and the valve seat and to reduce leakage from the slide valve element.

(へ)実施例 以下この発明を第1図乃至第3図に示す実施例に基いて
説明する。
(f) Examples The present invention will be explained below based on the examples shown in FIGS. 1 to 3.

1は圧縮装置で、この圧縮装置には高圧ライン2と低圧
ライン3とが接続されている。4はシリンダで、このシ
リンダ内にはクランク機構(図示せず)で駆動されるシ
ャフト5により往復摺動するディスプレーサ6が収納さ
れているとともに。
1 is a compression device, and a high pressure line 2 and a low pressure line 3 are connected to this compression device. A cylinder 4 houses a displacer 6 that slides back and forth by a shaft 5 driven by a crank mechanism (not shown).

このディスプレーサによって可変容積のバッファー空間
7と膨張空間8とが区画形成されている。
A variable volume buffer space 7 and an expansion space 8 are defined by this displacer.

これらのバッファー空間と膨張空間とはディスプレーサ
6内の空間9を介して連通している。この空間内には金
網で形成された蓄熱材10が配置されている。シリンダ
4の上壁11にはバッファー空間7に開口した給排気口
12が設けられている。
The buffer space and the expansion space communicate with each other via a space 9 within the displacer 6. A heat storage material 10 made of wire mesh is arranged within this space. The upper wall 11 of the cylinder 4 is provided with an air supply/exhaust port 12 that opens into the buffer space 7 .

13はこの給排気口に接続された給排気装置で。13 is a supply/exhaust device connected to this supply/exhaust port.

この給排気装置は高圧ライン2と低圧ライン3とを交互
に給排気口12に連通させている。シリンダ4の底壁1
4には被冷却物を冷却する負荷熱交換器15が取付けら
れている。
This air supply/exhaust device alternately connects a high pressure line 2 and a low pressure line 3 to an air supply/exhaust port 12. Bottom wall 1 of cylinder 4
4 is attached with a load heat exchanger 15 for cooling the object to be cooled.

給排気装置13は中空16の案内箱17と、この案内箱
内に収納された弁座18と、この弁座に接触しながら往
復摺動するスライド弁体19とで形成されている。弁座
18にはシリンダ4の給排気口12に連通ずる給排気連
絡孔20と、圧縮装置1の高圧ライン2に連通ずる高圧
ライン連絡孔21とが設けられている。スライド弁体1
9は駆動装置(図示せず)に1端を結合されたピン22
を案内箱17に軸支して摺動自在に取付けられている。
The supply/exhaust device 13 is formed of a guide box 17 having a hollow 16, a valve seat 18 housed in the guide box, and a slide valve body 19 that slides back and forth while contacting the valve seat. The valve seat 18 is provided with a supply/exhaust communication hole 20 communicating with the supply/exhaust port 12 of the cylinder 4 and a high pressure line communication hole 21 communicating with the high pressure line 2 of the compressor 1 . Slide valve body 1
9 is a pin 22 connected at one end to a drive device (not shown).
is pivotally supported and slidably attached to the guide box 17.

スライド弁体19には給排気連絡孔2oと高圧ライン連
絡孔21とを連通ずる凹所23が設けられている。案内
箱17には中空16内に開口して圧縮装置1の低圧ライ
ン3に連通ずる低圧ライン連絡孔24が設けられている
。弁座18のスライド弁体19と反対側の面には圧縮装
置1の高圧ライン2からの冷媒圧力を受ける圧力受面2
5が形成されている。
The slide valve body 19 is provided with a recess 23 that communicates the supply/exhaust communication hole 2o with the high pressure line communication hole 21. The guide box 17 is provided with a low pressure line communication hole 24 that opens into the hollow 16 and communicates with the low pressure line 3 of the compression device 1. A pressure receiving surface 2 that receives refrigerant pressure from the high pressure line 2 of the compression device 1 is provided on the surface of the valve seat 18 opposite to the slide valve body 19.
5 is formed.

このように構成された極低温用冷凍機の給排気装置にお
いて、スライド弁体19の動作状態を説明する。まず、
ディスプレーサ6がシリンダ4内の最上位(下死点)に
あると、給排気装置13のスライド弁体19は第2図の
如(右側に位置し。
The operating state of the slide valve body 19 in the air supply and exhaust system for a cryogenic refrigerator configured as described above will be explained. first,
When the displacer 6 is at the uppermost position (bottom dead center) in the cylinder 4, the slide valve body 19 of the air supply/exhaust device 13 is located on the right side as shown in FIG.

給排気連絡孔20と低圧ライン連絡孔24とを連通させ
、シリンダ4内の冷媒を低圧ライン3より圧縮装置1に
排気させている。次に、ディスプレーサ6がシリンダ4
内の最下位(上死点)にあると、給排気装置13のスラ
イド弁体19は第3図の如く左側・に位置し、給排気連
絡孔20と高圧ライン連絡孔21とを凹所23を介して
連通させ。
The supply/exhaust communication hole 20 and the low pressure line communication hole 24 are communicated with each other, and the refrigerant in the cylinder 4 is exhausted from the low pressure line 3 to the compression device 1. Next, the displacer 6 is moved to the cylinder 4.
When the slide valve body 19 of the air supply/exhaust device 13 is located at the lowest position (top dead center) on the left side as shown in FIG. communicate through.

圧縮装置1で加圧された冷媒をシリンダ4内に供給させ
ている。給排気装置13は以上の動作を繰返すことによ
り、シリンダ4の給排気口12を高圧ライン2と低圧ラ
イン3とに交互に連通させている。
Refrigerant pressurized by the compression device 1 is supplied into the cylinder 4. By repeating the above operations, the supply/exhaust device 13 connects the supply/exhaust port 12 of the cylinder 4 to the high pressure line 2 and the low pressure line 3 alternately.

スライド弁体19の接触する弁座18はこのスライド弁
体と反対側の面に形成した圧力受面25で高圧ライン2
からの圧力を受けることにより。
The valve seat 18 that the slide valve body 19 comes into contact with is a pressure receiving surface 25 formed on the opposite side of the slide valve body, and is connected to the high pressure line 2.
By being under pressure from.

圧縮装置1の低圧ライン3に連通している案内箱17の
中空16との圧力差でスライド弁体19に押付けられ、
このスライド弁体の凹所23から中空16への冷媒のリ
ークを防止するようにしている。また、弁座18をスラ
イド弁体19に押付けているので、この弁座とスライド
弁体との摺動面が摩耗したとしても、スライド弁体19
のシール性は低下しないようにされている。このため、
スライド弁体19の凹所23から中空16への冷媒のリ
ークが少な(たり、冷凍能力を向上させられる。しかも
、スライド弁体19はシール幅を狭くさせられるので、
小型化させられるとともに、ストロークを小さくさせら
れ、出力の小さな駆動装置で動くようにされている。
Pressed against the slide valve body 19 due to the pressure difference with the hollow 16 of the guide box 17 communicating with the low pressure line 3 of the compression device 1,
This is to prevent refrigerant from leaking from the recess 23 of the slide valve body into the hollow space 16. In addition, since the valve seat 18 is pressed against the slide valve body 19, even if the sliding surface between the valve seat and the slide valve body is worn out, the slide valve body 19
The sealing performance of the material is maintained so as not to deteriorate. For this reason,
Leakage of refrigerant from the recess 23 of the slide valve body 19 to the hollow space 16 is reduced (or the refrigeration capacity is improved. Moreover, since the seal width of the slide valve body 19 is narrowed,
It has been made smaller, has a smaller stroke, and is powered by a drive device with a smaller output.

尚、上記説明においては、弁座18を圧力差でスライド
弁体19側に押付けるように説明したが、第4図に示す
ように弁座26をコイルバネ27でスライド弁体19側
に押付けるようにしても同様な効果を有することは言う
までもない。
In the above description, the valve seat 18 is pressed against the slide valve body 19 by a pressure difference, but as shown in FIG. 4, the valve seat 26 is pressed against the slide valve body 19 by a coil spring 27. Needless to say, the same effect can be obtained even if the method is done in this manner.

(ト)発明の効果 この発明の極低温用冷凍機の給排気装置は給排気装置を
中空の案内箱と、この案内箱内に収納された弁座と、こ
の弁座に接触しながら往復摺動するスライド弁体とで構
成し、この弁座にシリンダの給排気口に連通ずる排気連
通孔と圧縮装置の高圧ラインに連通ずる高圧ライン連絡
孔とを設け。
(G) Effects of the Invention The air supply and exhaust system for a cryogenic refrigerator according to the present invention includes a hollow guide box, a valve seat housed in the guide box, and a reciprocating slide while in contact with the valve seat. It consists of a sliding valve body that moves, and the valve seat is provided with an exhaust communication hole that communicates with the supply and exhaust port of the cylinder and a high pressure line communication hole that communicates with the high pressure line of the compression device.

かつ、案内箱に圧縮装置の低圧ラインに連通ずる低圧ラ
イン連絡孔を設け、スライド弁体に給排気口連絡孔と高
圧ライン連絡孔とを連通させる凹所を設け、前記弁座の
スライド弁体と反対側の面にこのスライド弁体側に弁座
を押圧する抑圧手段を設けたのであるから、弁座をスラ
イド弁体側に押付けることによって、このスライド弁体
を小型化してシール幅を狭くさせてもスライド弁体から
のリークを少なくでき、冷凍能力を向上できる。しかも
、スライド弁体を小型化させられるので、このスライド
弁体を出力の小さな駆動装置で駆動できる。
The guide box is provided with a low pressure line communication hole that communicates with the low pressure line of the compression device, the slide valve body is provided with a recess that communicates the supply/exhaust port communication hole with the high pressure line communication hole, and the slide valve body of the valve seat is provided with a recess that communicates with the high pressure line communication hole. Since a suppressing means is provided on the opposite side of the slide valve body to press the valve seat toward the slide valve body, by pressing the valve seat against the slide valve body, the slide valve body can be made smaller and the seal width can be narrowed. However, leakage from the slide valve body can be reduced and refrigeration capacity can be improved. Moreover, since the slide valve body can be made smaller, this slide valve body can be driven by a drive device with a small output.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図乃至第3図はこの発明を示し、第1図は極低温用
冷凍機の図解的な断面図、第2図は排気状態の給排気装
置の断面図、第3図は給気状態の給排気装置の断面図、
第4図は他の実施例を示す給排気装置の断面図、第5図
は従来の極低温用冷凍機の図解的な断面図である。 1・・・圧縮装置、  2・・・高圧ライン、 3・・
・低圧ライン、  4・・・シリン、ダ、  6・・・
ディスプレーサ。 7・・・バッファー空間、 計・・膨張空間、 9・・
・空間、10・・・蓄熱材、12・・・給排気口、13
・・・給排気装置、■−6・・・中空、17・・・案内
箱。 18.26・・・弁座、  19・・・スライド弁体。 20・・・給排気連絡孔、 21・・・高圧ライン連絡
孔。 23・・・凹所、24・・・低圧ライン連絡孔、25・
・・圧力受面、27・・・コイルバネ。
Figures 1 to 3 illustrate the present invention, with Figure 1 being a schematic cross-sectional view of a cryogenic refrigerator, Figure 2 being a cross-sectional view of the air supply/exhaust device in the exhaust state, and Figure 3 being the air supply state. A cross-sectional view of the air supply and exhaust system,
FIG. 4 is a sectional view of a supply/exhaust device showing another embodiment, and FIG. 5 is a schematic sectional view of a conventional cryogenic refrigerator. 1... Compression device, 2... High pressure line, 3...
・Low pressure line, 4... cylinder, da, 6...
Displacer. 7... Buffer space, Total... Expansion space, 9...
・Space, 10... Heat storage material, 12... Supply/exhaust port, 13
...Air supply/exhaust system, ■-6...Hollow, 17...Information box. 18.26... Valve seat, 19... Slide valve body. 20... Supply/exhaust communication hole, 21... High pressure line communication hole. 23... recess, 24... low pressure line communication hole, 25...
...Pressure receiving surface, 27...Coil spring.

Claims (1)

【特許請求の範囲】[Claims] 1、シリンダと、このシリンダ内で往復摺動するディス
プレーサと、このディスプレーサによつてシリンダ内部
に区画形成されるバッファー空間と膨張空間と、これら
のバッファー空間と膨張空間とを連通するガス流路に配
設された蓄熱材と、圧縮装置と、シリンダの給排気口を
圧縮装置の高圧ラインと低圧ラインとに交互に連通させ
る給排気装置とからなる極低温用冷凍機において、前記
給排気装置は中空の案内箱と、この案内箱内に収納され
た弁座と、この弁座に接触しながら往復摺動するスライ
ド弁体とを備え、弁座にはシリンダの給排気口に連通す
る給排気連絡孔と圧縮装置の高圧ラインに連通する高圧
ライン連絡孔とが設けられ、かつ、案内箱には圧縮装置
の低圧ラインに連通する低圧ライン連絡孔が設けられ、
スライド弁体には給排気口連絡孔と高圧ライン連絡孔と
を連通させる凹所が設けられ、前記弁座のスライド弁体
と反対側の面にはこのスライド弁体側に弁座を押圧する
押圧手段が設けられていることを特徴とする極低温用冷
凍機の給排気装置。
1. A cylinder, a displacer that slides back and forth within the cylinder, a buffer space and an expansion space defined inside the cylinder by the displacer, and a gas flow path that communicates these buffer spaces and the expansion space. In a cryogenic refrigerator comprising a heat storage material provided, a compression device, and an air supply/exhaust device that alternately communicates an air supply/exhaust port of a cylinder with a high pressure line and a low pressure line of the compression device, the air supply/exhaust device comprises: It is equipped with a hollow guide box, a valve seat housed in the guide box, and a slide valve body that slides back and forth while contacting the valve seat. The communication hole is provided with a high pressure line communication hole that communicates with the high pressure line of the compression device, and the guide box is provided with a low pressure line communication hole that communicates with the low pressure line of the compression device,
The slide valve body is provided with a recess that communicates the supply/exhaust port communication hole with the high-pressure line communication hole, and the surface of the valve seat opposite to the slide valve body has a pressing force that presses the valve seat toward the slide valve body. A supply/exhaust device for a cryogenic refrigerator, characterized in that a means is provided.
JP28361087A 1987-11-10 1987-11-10 Suction exhaust device for cryogenic refrigerator Pending JPH01123955A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28361087A JPH01123955A (en) 1987-11-10 1987-11-10 Suction exhaust device for cryogenic refrigerator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28361087A JPH01123955A (en) 1987-11-10 1987-11-10 Suction exhaust device for cryogenic refrigerator

Publications (1)

Publication Number Publication Date
JPH01123955A true JPH01123955A (en) 1989-05-16

Family

ID=17667732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28361087A Pending JPH01123955A (en) 1987-11-10 1987-11-10 Suction exhaust device for cryogenic refrigerator

Country Status (1)

Country Link
JP (1) JPH01123955A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008214987A (en) * 2007-03-06 2008-09-18 Toyota Auto Body Co Ltd Power back door of vehicle
CN111615663A (en) * 2018-12-19 2020-09-01 深圳市大疆创新科技有限公司 Control device, imaging system, mobile object, control method, and program

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008214987A (en) * 2007-03-06 2008-09-18 Toyota Auto Body Co Ltd Power back door of vehicle
CN111615663A (en) * 2018-12-19 2020-09-01 深圳市大疆创新科技有限公司 Control device, imaging system, mobile object, control method, and program

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