JPH01123495U - - Google Patents

Info

Publication number

JPH01123495U

JPH01123495U JP1765788U JP1765788U JPH01123495U JP H01123495 U JPH01123495 U JP H01123495U JP 1765788 U JP1765788 U JP 1765788U JP 1765788 U JP1765788 U JP 1765788U JP H01123495 U JPH01123495 U JP H01123495U

Authority

JP

Japan

Prior art keywords

electrode

chuck

dielectric layer

insulator

high resistance

Prior art date

1988-02-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000012212 insulator Substances 0.000 claims description 2
• 239000003973 paint Substances 0.000 claims description 2
• 239000003463 adsorbent Substances 0.000 claims 1
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1