JPH01122965A - Piezoelectric ceramics composition - Google Patents
Piezoelectric ceramics compositionInfo
- Publication number
- JPH01122965A JPH01122965A JP62278370A JP27837087A JPH01122965A JP H01122965 A JPH01122965 A JP H01122965A JP 62278370 A JP62278370 A JP 62278370A JP 27837087 A JP27837087 A JP 27837087A JP H01122965 A JPH01122965 A JP H01122965A
- Authority
- JP
- Japan
- Prior art keywords
- composition
- ceramics composition
- piezoelectric ceramics
- piezoelectric ceramic
- compositions
- Prior art date
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- Pending
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- 239000000203 mixture Substances 0.000 title claims abstract description 55
- 239000000919 ceramic Substances 0.000 title claims abstract description 23
- 239000006104 solid solution Substances 0.000 claims abstract description 7
- 230000008878 coupling Effects 0.000 abstract description 12
- 238000010168 coupling process Methods 0.000 abstract description 12
- 238000005859 coupling reaction Methods 0.000 abstract description 12
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract description 6
- 229910000978 Pb alloy Inorganic materials 0.000 abstract description 4
- 238000005245 sintering Methods 0.000 abstract description 3
- 238000005303 weighing Methods 0.000 abstract description 3
- HFLAMWCKUFHSAZ-UHFFFAOYSA-N niobium dioxide Inorganic materials O=[Nb]=O HFLAMWCKUFHSAZ-UHFFFAOYSA-N 0.000 abstract description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 238000000748 compression moulding Methods 0.000 abstract 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 abstract 1
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 abstract 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N lead(II) oxide Inorganic materials [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N nickel(II) oxide Inorganic materials [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 9
- 230000005684 electric field Effects 0.000 description 8
- 229910052573 porcelain Inorganic materials 0.000 description 7
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000010287 polarization Effects 0.000 description 3
- -1 Bl or Sr Chemical class 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 238000001354 calcination Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910003781 PbTiO3 Inorganic materials 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、ブザー、アクチエフタ−等の種々のトランジ
ューサーに用いる圧電性磁器組成物に関し、更に詳しく
は複合金属酸化物を３成分とする圧電性磁器組成物に関
する。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a piezoelectric ceramic composition used for various transducers such as buzzers and actuators, and more specifically to a piezoelectric ceramic composition containing three components of a composite metal oxide. The present invention relates to a sexual porcelain composition.
（従来の技術）
従来、この種の圧電性磁器組成物としては、Ｐｂ（Ｎｉ
ｌ／３Ｎｂ２／３）Ｏｓ −Ｙ−ｐｂ’ｒｔｏ３−２−
ＰｂＺｒ０３ （’） ３成分系固溶体の組成物は知ら
れている。該組成物は比較的低温で焼結することが出来
、かつ優れた電気的特性、機械的特性を有するため、ソ
フト材料と称される複合酸化物から成る圧電性磁器組成
物として多用されている。また前記３成分系固溶体に更
にＰｂ（Ｚｎｌ／３Ｎｂ２／３）Ｏｘを加えたｐｂ（Ｎ
ｉｌ／３Ｎｂ２／３）０３ Ｐｂ（Ｚｎｌ／３Ｎｂ２
／３）Ｏｓ−ＰｂＴｉ０３−ＰｂＺｒＯｘの４成分系固
溶体の圧電性磁器組成物も知られている。(Prior Art) Conventionally, piezoelectric ceramic compositions of this type include Pb(Ni
l/3Nb2/3)Os -Y-pb'rto3-2-
Compositions of PbZr03 (') ternary solid solutions are known. This composition can be sintered at a relatively low temperature and has excellent electrical and mechanical properties, so it is often used as a piezoelectric ceramic composition made of composite oxide, which is called a soft material. . In addition, pb(Nb2/3)Ox was added to the three-component solid solution.
il/3Nb2/3)03Pb(Znl/3Nb2
/3) A piezoelectric ceramic composition of a four-component solid solution of Os-PbTi03-PbZrOx is also known.
トランジューサの性能向上要求に合せてトランジューサ
ーに用いる圧電性磁器組成物の電気機械結合係数（Ｋｐ
）、比誘電率（ε３Ｔ３／ε０）の向上を計るため前記
組成物のｐｂ金合金一部をＢｌまたはＳｒ等のアルカリ
土類金属で置換するが、或いは前記組成物中１： Ｌ１
２ ＣＯｓ 、Ｃｒｚ ０３、Ｍ２Ｏ３、ＳｌＯ□、Ｔ
ｅＯ２を少なくとも１種類添加することが行なわれてい
る。The electromechanical coupling coefficient (Kp) of piezoelectric ceramic compositions used in transducers has been
), in order to improve the dielectric constant (ε3T3/ε0), a part of the PB gold alloy in the composition is replaced with an alkaline earth metal such as Bl or Sr, or 1:L1 in the composition
2 COs, Crz 03, M2O3, SlO□, T
At least one type of eO2 is added.
（発明が解決しようとする問題点）
しかしながら前記組成物のうち前者の３成分系の圧電性
磁器組成物はＢ１置換したとき誘電率は大きくなるがそ
れに伴って焼結温度が上昇するという問題があり、また
Ｓｒ等のアルカリ土類金属置換したとき電気機械結合係
数、比誘電率は夫々大きくなるがその反面焼結性が悪化
し、かつキューリー温度（Ｔｃ）が低下するという問題
があり、またＬ１２ Ｃ０３等を添加したとき電気機械
結合係数は大きくなるがその反面焼結体の機械的強度は
低下して粒界破壊が生じるという問題がある。また後者
の４成分系の圧電性磁器組成物はキューリー温度の上昇
或いは抗電界（Ｅｃ）の向上はみられるが、電気機械結
合係数、比誘電率は何ら向上しないという問題がある。(Problems to be Solved by the Invention) However, among the above compositions, the former three-component piezoelectric porcelain composition has a problem in that when B1 is substituted, the dielectric constant increases, but the sintering temperature increases accordingly. Furthermore, when alkaline earth metals such as Sr are substituted, the electromechanical coupling coefficient and dielectric constant increase, but on the other hand, there are problems in that the sinterability deteriorates and the Curie temperature (Tc) decreases. When adding L12 C03, etc., the electromechanical coupling coefficient increases, but on the other hand, there is a problem that the mechanical strength of the sintered body decreases and grain boundary fracture occurs. Furthermore, although the latter four-component piezoelectric ceramic composition shows an increase in the Curie temperature or an improvement in the coercive electric field (Ec), there is a problem in that the electromechanical coupling coefficient and relative dielectric constant do not improve at all.
本発明は、低温焼結性を損うことなく、従来の３成分系
組成物と同等の優れたキューリー温度、抗電界および機
械的強度が得られ、かつ比誘電率および電気機械結合係
数が大きな圧電性磁器組成物を提供することを目的とす
る。The present invention provides excellent Curie temperature, coercive electric field, and mechanical strength equivalent to conventional three-component compositions without impairing low-temperature sinterability, and has a large dielectric constant and electromechanical coupling coefficient. The object of the present invention is to provide a piezoelectric ceramic composition.
（問題点を解決するための手段）
本発明者等は、前記目的を達成すべく圧電性磁器組成物
について鋭意検討した結果、従来の複合金属酸化物を３
成分系とする組成物のうちＰｂ（Ｎｉｌ／３Ｎｄ２／３
）０３から成る鉛合金中の旧の一部をＰｅに置換するこ
とにより、低温焼結性を損うことなく比誘電率および電
気機械結合係数が大きくなることを知見した。(Means for Solving the Problems) In order to achieve the above-mentioned object, the present inventors conducted extensive studies on piezoelectric ceramic compositions, and found that three
Among the compositions as component systems, Pb (Nil/3Nd2/3
It has been found that by replacing a portion of the lead alloy consisting of )03 with Pe, the relative permittivity and electromechanical coupling coefficient can be increased without impairing low temperature sinterability.
本発明は、前記知見に基づいてなされたものであって、
］１Ｐｂ（Ｎｌ（１−ａ）／３Ｆｅａ／３Ｎｂ２／３）
０３−Ｙ ・ＰｂＴｌ０ｇ −１−ＰｂＺｒ０３系固
溶体を主成分とし、Ｘ＋Ｙ＋Ｚ−１と表わしたときＸ、
Ｙ、 ２およびａが下記に示される範囲内の組成から
成ることを特徴とする。The present invention has been made based on the above findings, and includes:
]1Pb(Nl(1-a)/3Fea/3Nb2/3)
03-Y ・PbTl0g -1-PbZr03-based solid solution is the main component, and when expressed as X+Y+Z-1,
It is characterized in that Y, 2 and a have compositions within the ranges shown below.
０．０１０＜Ｘ＜０．６００
０．３２０＜Ｙ＜０．４５０
０．１００＜Ｚ＜０．３００
０．０１０＜ａ＜０．１００
本発明に用いるＰｂ（Ｎｉ（１−ａ）／３ Ｐｅａ／３
Ｎｂ２／３）０３の組成比（Ｘ＋Ｙ＋Ｚ−１）における
Ｘの値およびａの値、またＰｂＴｉＯ３の組成比におけ
るＹの値、ｐｂＺｒ０３の組成比におけるＺの値は、他
の鉛合金との相溶性、得られた組成物の比誘電率および
電気機械結合係数の向上、機械的強度の低下防止等の理
由から夫々Ｘはｏ、ｏｔｏ〜０．８００ 、 Ｙは０．
３２０〜０．４５０ 、Ｚは０．１００〜０．３００
、ａは０．０１０〜０．１００の範囲とする。0.010<X<0.600 0.320<Y<0.450 0.100<Z<0.300 0.010<a<0.100 Pb(Ni(1-a)/3 used in the present invention Pea/3
The values of X and a in the composition ratio (X+Y+Z-1) of Nb2/3)03, the value of Y in the composition ratio of PbTiO3, and the value of Z in the composition ratio of pbZr03 are determined by the compatibility with other lead alloys. For reasons such as improving the dielectric constant and electromechanical coupling coefficient of the obtained composition and preventing a decrease in mechanical strength, X is o and oto~0.800, and Y is 0.800, respectively.
320-0.450, Z is 0.100-0.300
, a is in the range of 0.010 to 0.100.
前記組成物は例えば所望組成比になるように各金属酸化
物の所定量を秤量し混合して得られた混合物を仮焼成し
、次いで加圧成型し、更に温度１０００〜１１００℃の
低温度で焼結して製造する。The composition may be prepared by, for example, weighing and mixing a predetermined amount of each metal oxide to obtain a desired composition ratio, pre-calcining the resulting mixture, then press-molding, and further heating at a low temperature of 1000 to 1100°C. Manufactured by sintering.
（実施例） 次に本発明の実施例および比較例について説明する。(Example) Next, examples and comparative examples of the present invention will be described.
実施例として、まずＰｂＯ、Ｎ１０ 、ＰｅＯ、ＮｂＯ
２、ＴｌＯ２、ＺｒＯ２の各工業用金属酸化物粉末を夫
々表−１に示す組成比になるように正確に秤量してこれ
らを湿式ボールミルによりｌＯ時間混合を行なった後、
空気中で温度９００℃で２時間仮焼成して仮焼成粉末を
得た。次に仮焼成粉末を再び湿式ボールミルにより１０
時間粉砕混合した後５００ ｋｇ ／ ｃｌの圧力で径
８ 、０ ｍｍ厚さ０ 、３１ ｍｍの円板状に加圧成
型し、これを空気中で温度１１００℃で２時間焼結して
焼結体を得た。得られた焼結体を従来公知手段で厚さ０
．３ｍｍ′に両面研磨し、両面に温度８００℃でＡｇ電
極を付け、温度１００℃のシリコンオイル中で３．５Ｋ
Ｖ／ｍｍの印加電圧で３０分間分極処理を施して圧電性
磁器組成物を作成し、これを実施例１ないし１６とした
。As an example, first, PbO, N10, PeO, NbO
2. After accurately weighing the industrial metal oxide powders of TlO2 and ZrO2 so as to have the composition ratio shown in Table 1, and mixing them in a wet ball mill for 10 hours,
A calcined powder was obtained by calcining in air at a temperature of 900° C. for 2 hours. Next, the pre-calcined powder is again processed in a wet ball mill for 10 minutes.
After pulverization and mixing for a period of time, the mixture was press-molded into a disc shape with a diameter of 8 mm and a thickness of 0 mm and 31 mm at a pressure of 500 kg/cl, and this was sintered in air at a temperature of 1100 °C for 2 hours. I got a body. The obtained sintered body was reduced to a thickness of 0 using conventionally known means.
．． Both sides were polished to 3mm', Ag electrodes were attached to both sides at a temperature of 800℃, and the temperature was 3.5K in silicone oil at a temperature of 100℃.
Piezoelectric ceramic compositions were prepared by performing polarization treatment at an applied voltage of V/mm for 30 minutes, and these were designated as Examples 1 to 16.
次に比較例としてＰｂＯ、ＮｉＯ、ＰｅＯ５Ｎｂ０２、
ＴＩＯ□、ＺｒＯ□の各工業用金属酸化物粉末を夫々表
−１に示すように特にａの組成比が０．１５と多くなる
ように正確に秤量する以外は実施例と同一の方法で圧電
性磁器組成物を作成し、これを比較例工ないし８とした
。Next, as comparative examples, PbO, NiO, PeO5Nb02,
The industrial metal oxide powders of TIO□ and ZrO□ were piezoelectrically produced in the same manner as in the example except that they were accurately weighed so that the composition ratio of a was as high as 0.15, as shown in Table 1. A porcelain composition was prepared and designated as Comparative Examples No. 8.
更に従来例としてＰｂＯ、ＮｔＯ、ＮｂＯ２、ＴｉＯ□
、ＺｒＯ２の各工業用金属酸化物粉末を夫々表−１に示
す組成比になるように正確に秤量する以外は実施例と同
一の方法で圧電性磁器組成物を作成し、これを従来例１
ないし８とした。Furthermore, as conventional examples, PbO, NtO, NbO2, TiO□
A piezoelectric ceramic composition was prepared in the same manner as in the example except that each industrial metal oxide powder of ZrO2 was accurately weighed to have the composition ratio shown in Table 1.
It was set as 8 to 8.
この実施例１ないし１６、比較例工ないし８および従来
例１ないし８の圧電性磁器組成物の夫々について電気的
特性として分極処理前後の比誘電率（ε３〒、／ε０）
と、径方向電気機械結合係数（Ｋｐ）を調べ、また機械
的強度として該組成物を破壊し、破壊面を８８Ｍ観察し
て破壊が粒内破壊か、粒界破壊かを調べたところ、表−
１にする結果が得られた。The electrical properties of the piezoelectric ceramic compositions of Examples 1 to 16, Comparative Examples 1 to 8, and Conventional Examples 1 to 8 are the dielectric constants (ε3〒, /ε0) before and after polarization treatment.
The radial electromechanical coupling coefficient (Kp) was investigated, and the composition was fractured to determine mechanical strength, and the fracture surface was observed at 88M to determine whether the fracture was intragranular or intergranular fracture. −
1 was obtained.
同表−１における機械的強度の評価Ａは粒内破壊を示し
、またＢは粒界破壊を示す。Mechanical strength evaluation A in Table 1 indicates intragranular fracture, and B indicates intergranular fracture.
次に前記実施例３，４，１１．１２の圧電性磁器組成物
と、比較例２，６の圧電性磁器組成、物と、従来例２．
６の圧電性磁器組成物の夫々についてキューリー温度（
Ｔｃ）と抗電界（Ｅｅ）を調べたところ、表−２に示す
結果が得られた。Next, the piezoelectric porcelain compositions of Examples 3, 4, 11.12, the piezoelectric porcelain compositions of Comparative Examples 2 and 6, and the conventional example 2.
The Curie temperature (
When the Tc) and coercive electric field (Ee) were investigated, the results shown in Table 2 were obtained.
表−２
同様にして前記実施例３，４，１１．１２以外の実施例
の圧電性磁器組成物の夫々についてキューリー温度と抗
電界について調べたところ、実施例３，４，１１．１２
と同様の結果であった。また前記比較例２．６以外の比
較例の圧電性磁器組成物の夫々についてもキューリー温
度と抗電界について調べたところ、比較例２，６と同様
の結果であった。更に前記従来例２，６以外の従来例の
圧電性磁器組成物の夫々についてもキューリー温度と抗
電界について調べたところ、従来例２，６と同様の結果
であった。Table 2 In the same manner, the Curie temperature and coercive electric field of each of the piezoelectric ceramic compositions of Examples other than Examples 3, 4, and 11.12 were investigated.
The results were similar. Furthermore, when the Curie temperature and coercive electric field of each of the piezoelectric ceramic compositions of comparative examples other than Comparative Examples 2 and 6 were investigated, the results were similar to those of Comparative Examples 2 and 6. Further, when the Curie temperature and coercive electric field of each of the piezoelectric ceramic compositions of conventional examples other than the conventional examples 2 and 6 were investigated, the results were similar to those of conventional examples 2 and 6.
表−１および表−２から明らかなように実施例ユないし
１６の圧電性磁器組成物は従来例１ないし圧電性磁器組
成物に比してキューリー温度および抗電界が同等以上で
あり、また分極処理前後の比誘電率および径方向電気機
械結合係数は共に向上しており、かつ機械的強度も粒内
破壊と従来例と何ら遜色がなかった。これに対してａ
（Ｐｅ）の組成比が本発明の組成比の範囲外の比較例ユ
ないし８の圧電性磁器組成物は機械的強度が粒界破壊と
強度の低下が見られ、比誘電率、電気機械結合係数はい
ずれか一方のみの向上であった。As is clear from Tables 1 and 2, the piezoelectric porcelain compositions of Examples U to 16 have Curie temperatures and coercive electric fields equal to or higher than those of Conventional Examples 1 to 1, and the polarization Both the dielectric constant and radial electromechanical coupling coefficient before and after the treatment were improved, and the mechanical strength was also comparable to the conventional example in terms of intragranular fracture. On the other hand, a
The piezoelectric porcelain compositions of Comparative Examples U to 8, in which the composition ratio of (Pe) was outside the range of the composition ratio of the present invention, showed grain boundary fracture and a decrease in mechanical strength, and the relative dielectric constant and electromechanical bond Only one of the coefficients improved.
従って、実施例工ないし１６の圧電性磁器組成物は低温
焼結性を損うことなく比誘電率および電気機械結合体が
大きくなったことが確認された。Therefore, it was confirmed that the piezoelectric ceramic compositions of Examples No. 1 to No. 16 had increased relative permittivity and electromechanical coupling without impairing low-temperature sinterability.
（発明の効果）
本発明によれば、Ｘ・Ｐｂ（Ｎ１（１−ａ）／３Ｆｅａ
／３Ｎｂ２／１）０３−Ｙ−ＰｂＴ１０３−Ｚ・Ｐｂｚ
「０３系固溶体を主成分とし、Ｘ＋Ｙ＋Ｚ＝１と表わし
たときＸ、 Ｙ、 ２およびａが下記に示される範囲内
の組成
０．０１０＜Ｘ＜０．６００
０．３２０＜Ｙ＜０．４５０
０．１００＜ｚ＜０．３００
０．０１０＜ａ＜０．１００
と成るようにしたので、低温焼結性を損うことなく、従
来の３成分系組成物と同等の優れたキューリー温度、抗
電界および機械的強度が得られ、かつ比誘電率および電
気機械結合係数が大きな圧電性磁器組成物を提供するこ
とが出来る効果がある。(Effect of the invention) According to the present invention, X・Pb(N1(1-a)/3Fea
/3Nb2/1)03-Y-PbT103-Z・Pbz
03-based solid solution as the main component, and when expressed as X+Y+Z=1, the composition where X, Y, 2, and a are within the ranges shown below: 0.010<X<0.600 0.320<Y<0.450 0.100<z<0.300 0.010<a<0.100. Therefore, the Curie temperature is as high as that of conventional three-component compositions, without impairing low-temperature sinterability. This has the effect of providing a piezoelectric ceramic composition that provides a high coercive electric field and mechanical strength, and has a large relative dielectric constant and electromechanical coupling coefficient.
Claims (1)
Ｏ＿３−Ｙ・ＰｂＴｉＯ＿３−Ｚ・ＰｂＺｒＯ＿３系固
溶体を主成分とし、Ｘ＋Ｙ＋Ｚ＝１と表わしたときＸ、
Ｙ、Ｚおよびａが下記に示される範囲内の組成から成る
ことを特徴とする圧電性磁器組成物。 ０．０１０＜Ｘ＜０．６００ ０．３２０＜Ｙ＜０．４５０ ０．１００＜Ｚ＜０．３００ ０．０１０＜ａ＜０．１００[Claims] X・Pb(Ni(1-a)/3Fea/3Nb2/3)
When O_3-Y・PbTiO_3-Z・PbZrO_3-based solid solution is the main component and expressed as X+Y+Z=1,
A piezoelectric ceramic composition characterized in that Y, Z and a are within the ranges shown below. 0.010<X<0.600 0.320<Y<0.450 0.100<Z<0.300 0.010<a<0.100
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62278370A JPH01122965A (en) | 1987-11-05 | 1987-11-05 | Piezoelectric ceramics composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62278370A JPH01122965A (en) | 1987-11-05 | 1987-11-05 | Piezoelectric ceramics composition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01122965A true JPH01122965A (en) | 1989-05-16 |
Family
ID=17596390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62278370A Pending JPH01122965A (en) | 1987-11-05 | 1987-11-05 | Piezoelectric ceramics composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01122965A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10142268B4 (en) * | 2000-08-31 | 2007-02-08 | Murata Mfg. Co., Ltd., Nagaokakyo | Piezoelectric ceramic composition for a SAW device and its use |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5142750A (en) * | 1974-10-15 | 1976-04-12 | Dow Corning | Fuhowahoriesuterubunsaneki |
| JPS5219320A (en) * | 1975-08-06 | 1977-02-14 | Hitachi Zosen Corp | Secondary wall insualtion system of low temperature iquefied gas stora ge |
-
1987
- 1987-11-05 JP JP62278370A patent/JPH01122965A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5142750A (en) * | 1974-10-15 | 1976-04-12 | Dow Corning | Fuhowahoriesuterubunsaneki |
| JPS5219320A (en) * | 1975-08-06 | 1977-02-14 | Hitachi Zosen Corp | Secondary wall insualtion system of low temperature iquefied gas stora ge |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10142268B4 (en) * | 2000-08-31 | 2007-02-08 | Murata Mfg. Co., Ltd., Nagaokakyo | Piezoelectric ceramic composition for a SAW device and its use |
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