JPH01122047U - - Google Patents

Info

Publication number
JPH01122047U
JPH01122047U JP1888588U JP1888588U JPH01122047U JP H01122047 U JPH01122047 U JP H01122047U JP 1888588 U JP1888588 U JP 1888588U JP 1888588 U JP1888588 U JP 1888588U JP H01122047 U JPH01122047 U JP H01122047U
Authority
JP
Japan
Prior art keywords
inert gas
ceramic substrate
substrate
opening
mounting plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1888588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1888588U priority Critical patent/JPH01122047U/ja
Publication of JPH01122047U publication Critical patent/JPH01122047U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Charging Or Discharging (AREA)
  • Furnace Details (AREA)
JP1888588U 1988-02-16 1988-02-16 Pending JPH01122047U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1888588U JPH01122047U (zh) 1988-02-16 1988-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1888588U JPH01122047U (zh) 1988-02-16 1988-02-16

Publications (1)

Publication Number Publication Date
JPH01122047U true JPH01122047U (zh) 1989-08-18

Family

ID=31233920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1888588U Pending JPH01122047U (zh) 1988-02-16 1988-02-16

Country Status (1)

Country Link
JP (1) JPH01122047U (zh)

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