JPH01121933U - - Google Patents
Info
- Publication number
- JPH01121933U JPH01121933U JP1764388U JP1764388U JPH01121933U JP H01121933 U JPH01121933 U JP H01121933U JP 1764388 U JP1764388 U JP 1764388U JP 1764388 U JP1764388 U JP 1764388U JP H01121933 U JPH01121933 U JP H01121933U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- base plate
- chuck
- axial direction
- leaf springs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1764388U JPH01121933U (fr) | 1988-02-12 | 1988-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1764388U JPH01121933U (fr) | 1988-02-12 | 1988-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01121933U true JPH01121933U (fr) | 1989-08-18 |
Family
ID=31231608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1764388U Pending JPH01121933U (fr) | 1988-02-12 | 1988-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01121933U (fr) |
-
1988
- 1988-02-12 JP JP1764388U patent/JPH01121933U/ja active Pending