JPH01121922U - - Google Patents

Info

Publication number
JPH01121922U
JPH01121922U JP1664788U JP1664788U JPH01121922U JP H01121922 U JPH01121922 U JP H01121922U JP 1664788 U JP1664788 U JP 1664788U JP 1664788 U JP1664788 U JP 1664788U JP H01121922 U JPH01121922 U JP H01121922U
Authority
JP
Japan
Prior art keywords
support substrate
susceptor
recessed hole
thin plate
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1664788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1664788U priority Critical patent/JPH01121922U/ja
Publication of JPH01121922U publication Critical patent/JPH01121922U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1664788U 1988-02-10 1988-02-10 Pending JPH01121922U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1664788U JPH01121922U (US20090163788A1-20090625-C00002.png) 1988-02-10 1988-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1664788U JPH01121922U (US20090163788A1-20090625-C00002.png) 1988-02-10 1988-02-10

Publications (1)

Publication Number Publication Date
JPH01121922U true JPH01121922U (US20090163788A1-20090625-C00002.png) 1989-08-18

Family

ID=31229760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1664788U Pending JPH01121922U (US20090163788A1-20090625-C00002.png) 1988-02-10 1988-02-10

Country Status (1)

Country Link
JP (1) JPH01121922U (US20090163788A1-20090625-C00002.png)

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