JPH01121921U - - Google Patents

Info

Publication number
JPH01121921U
JPH01121921U JP1664688U JP1664688U JPH01121921U JP H01121921 U JPH01121921 U JP H01121921U JP 1664688 U JP1664688 U JP 1664688U JP 1664688 U JP1664688 U JP 1664688U JP H01121921 U JPH01121921 U JP H01121921U
Authority
JP
Japan
Prior art keywords
support substrate
susceptor
insulating thin
thin plate
upper insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1664688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1664688U priority Critical patent/JPH01121921U/ja
Publication of JPH01121921U publication Critical patent/JPH01121921U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1664688U 1988-02-10 1988-02-10 Pending JPH01121921U (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1664688U JPH01121921U (US20080094685A1-20080424-C00004.png) 1988-02-10 1988-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1664688U JPH01121921U (US20080094685A1-20080424-C00004.png) 1988-02-10 1988-02-10

Publications (1)

Publication Number Publication Date
JPH01121921U true JPH01121921U (US20080094685A1-20080424-C00004.png) 1989-08-18

Family

ID=31229758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1664688U Pending JPH01121921U (US20080094685A1-20080424-C00004.png) 1988-02-10 1988-02-10

Country Status (1)

Country Link
JP (1) JPH01121921U (US20080094685A1-20080424-C00004.png)

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