JPH01121920U - - Google Patents
Info
- Publication number
- JPH01121920U JPH01121920U JP1714388U JP1714388U JPH01121920U JP H01121920 U JPH01121920 U JP H01121920U JP 1714388 U JP1714388 U JP 1714388U JP 1714388 U JP1714388 U JP 1714388U JP H01121920 U JPH01121920 U JP H01121920U
- Authority
- JP
- Japan
- Prior art keywords
- scribe line
- integrated circuit
- separates
- chips
- circuit chips
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1714388U JPH01121920U (no) | 1988-02-12 | 1988-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1714388U JPH01121920U (no) | 1988-02-12 | 1988-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01121920U true JPH01121920U (no) | 1989-08-18 |
Family
ID=31230663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1714388U Pending JPH01121920U (no) | 1988-02-12 | 1988-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01121920U (no) |
-
1988
- 1988-02-12 JP JP1714388U patent/JPH01121920U/ja active Pending