JPH01120980U - - Google Patents

Info

Publication number

JPH01120980U

JPH01120980U JP1655388U JP1655388U JPH01120980U JP H01120980 U JPH01120980 U JP H01120980U JP 1655388 U JP1655388 U JP 1655388U JP 1655388 U JP1655388 U JP 1655388U JP H01120980 U JPH01120980 U JP H01120980U

Authority

JP

Japan

Prior art keywords

coated

rotating

material onto

coating material

coating device

Prior art date

1988-02-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011248 coating agent Substances 0.000 claims 4
• 238000000576 coating method Methods 0.000 claims 4
• 239000000463 material Substances 0.000 claims 2
• 229920002120 photoresistant polymer Polymers 0.000 description 3
• 238000004140 cleaning Methods 0.000 description 1
• 239000007788 liquid Substances 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1

Cited By (1)