JPH01120800A - Synchrotron radiation generating device and its assembly - Google Patents

Abstract

PURPOSE:To make it possible to insert or take out an integrated pump without decomposition by extending one end of an integrated pump chamber on the inner circumferential side of a duct to the inside in the circumferential direction to be separated from a deflection beam duct. CONSTITUTION:An integrated pump chamber 3 partitioned by a conductive slit 7 is provided on the inner circumferential side of a deflection part beam duct 1, and a guide 12 on a circular arc is provided on the base of the integrated pump chamber, while the integrated pump 10 is fixed on the upper surface of an insulator 11. Further, the integrated pump chamber 3 is separated from a deflection part beam duct 1 at the end part for being extended toward the inner circumferential side so as to be connected to the circular integrated pump insertion port 2. The integrated pump 10 is linear, but the guide 12 on the underside in the integrated pump chamber and the guide on the underside of the insulator 11 are made circular. Thereby, insertion into the integrated pump chamber and conversely pulling out from the integrated pump chamber can be easily performed without decomposing an electromagnet or the like.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a synchrotron radiation light generating device (hereinafter referred to as SOR).
), and its assembly method.

In particular, the present invention relates to an SOR device with an improved vacuum duct structure suitable for improving the maintainability of a built-in pump in a small industrial SOR device, and a method for assembling the same.

[Conventional technology]

Conventionally, regarding the structure of the built-in pump chamber for SOR equipment, Nuclear Instruments and Methods 17
7 (1980) pp. 111-115 (nuc
ear instruments and meth
ods177 (1980) ppH1-115).

That is, both ends of the built-in pump chamber are connected to the same flange as the deflection section beam duct, and in addition, only one SOR extraction duct is provided in the deflection section beam duct with a small charged particle beam deflection angle. . For this purpose, the deflection section beam duct is separated from the straight section beam duct by flanges on both sides, and the deflection section beam duct, in which the built-in pump is inserted, is pulled out from the magnetic pole gap of the deflection section electromagnet.
The built-in pump can be taken out.

[Problem that the invention attempts to solve]

When downsizing the SOR device to make it into an industrial device, in order to reduce manufacturing costs, the deflection portions for extracting the SOR light must be arranged in a concentrated manner.

For example, if an SOR device is configured with two straight parts and two deflection parts, one deflection part will bend the charged particle beam trajectory by 1800 degrees, and one deflection part will have multiple SOR extraction ducts. There is a need.

In this case, in the conventional structure of the deflection section beam duct, multiple SOR extraction ducts are connected to the deflection section beam duct, so the deflection section beam duct cannot be directly pulled out from the magnetic pole gap of the deflection section electromagnet. There's a problem. As a result, to replace or inspect the built-in pump,
It was necessary to sequentially disassemble the deflection section electromagnet, iron core, electromagnet cooling system, etc.

Furthermore, conventionally, one set of built-in pumps was arranged in one deflection section, but when the deflection angle of the deflection section becomes as large as 180°, the built-in pump can be installed from the flange at the end of the deflection section beam duct. Since it cannot be removed, there is a problem in that the built-in pump cannot be replaced without disassembling the deflection section beam duct itself.

An object of the present invention is to provide a synchrotron radiation generator in which the built-in pump can be inserted and removed without disassembling the deflection section beam duct, electromagnet, iron core, or electromagnet cooling system, and the maintainability of the built-in pump in the uneven thickness section is improved. is to provide.

[Means for solving problems]

The purpose is to connect the built-in pump chamber on the inner peripheral side of the deflection section beam duct directly to the flange at the end of the deflection section beam duct, as in the conventional case, but to connect the built-in pump chamber and the charged particle beam deflection section between the built-in pump chamber and the charged particle beam deflection section. partitioned by a slit, and at least one end of the circumferential end of the built-in pump chamber extends inward from the inner periphery of the charged particle beam deflection section, and the extended portion This is achieved by an SOR device assembly method in which multiple sets of built-in pumps are fixed to an insulator and sequentially inserted into the built-in pump chamber, and electrodes between the built-in pumps are connected during this insertion process. [Function] According to the present invention, at least one end of the built-in pump chamber on the inner peripheral side of the deflection section beam duct is extended inward in the circumferential direction and separated from the deflection beam duct, so that the deflection section beam duct and the electromagnet/ The built-in pump can be inserted or removed without disassembling the core/electromagnetic cooling system. As a result, the maintainability of the single built-in pump is improved.

〔Example〕

Next, an embodiment of the SOR device according to the present invention will be described.

Figure 1 shows the deflection section of a small industrial SOR device.

In FIG. 1, reference numeral 1 denotes a beam duct of a deflection section.

A charged particle beam enters from one end and exits from the other end. Both ends of the deflection section beam duct 1 are straight section beam ducts 4a having the same cross-sectional shape.

Connected to 4b.

Three SOR extraction ducts 5 are connected to the outer circumferential side of the deflection section beam duct 1, and a built-in pump chamber 3 is provided through a slit 7 to the inner circumferential side.

The built-in pump chamber 3 is separated from the deflection section beam duct 1 at its end, extends inward, and is connected to the arc-shaped built-in pump insertion port 2.

The trajectory 6 of the charged particle beam draws a circular trajectory within the deflection section beam duct 1 by an uneven thickness section electromagnet (not shown). It is placed midway between the outer wall and the outer wall.

For better understanding, the cross-sectional shape of the deflection section beam duct 1 will be explained using FIG. 2. As shown in FIG. 2, a built-in pump chamber 3 partitioned by a conductive slit 7 is provided on the inner peripheral side of the deflection section beam duct 1. A guide 12 is provided, and the guide 12 is sandwiched between the insulator and built-in pump insertion guide.

In this embodiment, the insulator 11 is made of ceramics, and the built-in pump 10, on which the built-in pump 1o is fixed, has an insulator 1 on its bottom and both sides, as shown in FIG.
It will be surrounded by 1.

The inside of the built-in pump chamber 3 will be explained in more detail with reference to FIG. As shown in FIG. 3, two arcuate guides 12 are provided on the lower surface of the built-in pump chamber 3.

An insulator 11 is arranged on this guide 12. The built-in pump 1o is fixed to an insulator 11 at both ends thereof, and the electrodes of one built-in pump are connected by a lead wire 13.

Next, the operation of the present invention will be explained.

In FIG. 1, when the charged particle beam enters the deflection section beam duct 1 from the straight section beam duct 4a, although the cross-sectional shape of the beam duct is different, since the slit 7 is provided in the deflection section beam duct 1, Electrically, the cross-sectional shapes can be considered to be the same.

Therefore, the trajectory 6 of the charged particle beam will not become unstable even if the end of the built-in pump chamber 3 is extended inward in the circumferential direction on an arc.

As the built-in pump 10, an ion pump'<r p) or a non-evaporative getter pump (UEG) is used, both of which have electrodes and need to be separated and insulated from the conductive duct wall. In this implementation, the built-in pump 1 is
Since it is surrounded by 0, there will be no short circuit.

Next, a method for assembling the built-in pump 10 will be explained. Next, from the flange of the built-in pump insertion boat 2 on the inner peripheral side of the built-in pump chamber 3, the built-in pump 10 surrounded by the insulator 11 is inserted into the built-in pump 10. In this embodiment, the built-in pump 10 has a linear shape, but the guide 12 on the lower surface of the built-in pump chamber and the guide on the lower surface of the insulator 11 can be made into an arc shape. Therefore, it can be easily inserted into the built-in pump chamber or withdrawn from the built-in pump chamber without disassembling the electromagnet or the like.

In addition, since the linear built-in pump 10 is divided into a plurality of groups (six groups in this example), it can be inserted into the entire inner circumference of the deflection section beam duct 1 whose deflection angle is as high as 180 degrees. The pressure inside the system can be maintained at an ultra-high vacuum.

The ends of the built-in pump 1o, which are divided into a plurality of groups, are connected by lead wires 13, and the ends of the lead wires 13 are taken out from the current introduction terminal 8 of the built-in pump insertion port 2.

In addition, when disassembling the built-in pump 10, since the built-in pump chamber 3 extends in an arc shape to the inner peripheral side of the deflection section beam duct 1, the current introduction terminal 8 of the built-in pump insertion boat 2 described earlier By removing the electromagnet and pulling the lead wire 13, the electromagnet can be taken out without disassembling it.

In this embodiment, a case has been described in which a linear built-in pump 10 is used, but if a one-arc shaped built-in pump is used, insertion and removal of the built-in pump becomes easier.

In addition, in this example, current introduction terminals are provided at two ends of the built-in pump chamber 3, but two current introduction terminals 8 are taken out from one end, and a separate vacuum is connected to the other end. It is also possible to install a pump 10. In this case, it is effective for dedicated rough evacuation of the built-in pump chamber 3, which is partitioned from the deflection section beam duct 1 by the slit 7, and for exhausting air when the built-in pump fails.

〔Effect of the invention〕

According to the synchrotron radiation generator and its assembly method of the present invention as described above, the pump built into the uneven thickness part can be inserted and taken out without disassembling the uneven thickness part electromagnet, iron core, etc. This has the effect of improving the maintainability of the built-in pump.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an embodiment of the synchrotron radiation generating device of the present invention, FIG. 2 is a sectional view taken along line AA in FIG. 1, and FIG. 3 is a partially enlarged view of FIG. 1. 1... Deflection section beam duct, 3... Built-in pump chamber,
6... Charged particle beam trajectory, 7... Slit, 8...
...Current introduction terminal, 10...Built-in pump, 11...
Insulator, wil 2I27

Claims (1)

[Scope of Claims] 1. In a synchrotron radiation light generating device in which a built-in pump is disposed in a built-in pump chamber provided on the inner peripheral side of a charged particle beam deflection section, the built-in pump chamber and the charged particle beam A slit partitions the charged particle beam from the deflection section, and at least one end of the circumferential end of the built-in pump chamber extends inward from the inner periphery of the charged particle beam deflection section. Synchrotron synchrotron radiation generator. 2. A synchrotron radiation generating device according to claim 1, characterized in that an arc-shaped guide is provided on the inner bottom surface of the built-in pump chamber. 3. A synchrotron radiation generating device according to claim 1 or 2, wherein the built-in pump has an arc shape. 4. A synchrotron radiation light generating device according to claim 1, 2, or 3, wherein the built-in pump is composed of a plurality of vacuum pumps. 5. The device according to claim 1, 2, 3, or 4, wherein a power supply terminal for the built-in pump is provided at one end of the built-in pump chamber, and the power terminal for the built-in pump is provided at one end of the built-in pump chamber; A synchrotron synchrotron radiation generator characterized by having a built-in pump in its section. 6.Claims 1, 2, 3, 4,
Alternatively, in the apparatus according to claim 5, the built-in pump chamber is formed in an arc shape along the inner peripheral shape of the charged particle beam deflection section. 7. At least one end of the circumferential end of the built-in pump chamber, which is provided on the inner peripheral side of the charged particle beam deflection section and is partitioned from the charged particle beam deflection section by a slit, is connected to the charged particle beam. It extends inward from the inner periphery of the deflection part, and from this extended part, multiple sets of built-in pumps are fixed to an insulator and inserted into the built-in pump chamber one after another, and during this insertion process, the built-in pumps are A method for assembling a synchrotron radiation light generating device, the method comprising: connecting electrodes of the synchrotron radiation generator.