JPH01119152U - - Google Patents
Info
- Publication number
- JPH01119152U JPH01119152U JP1421088U JP1421088U JPH01119152U JP H01119152 U JPH01119152 U JP H01119152U JP 1421088 U JP1421088 U JP 1421088U JP 1421088 U JP1421088 U JP 1421088U JP H01119152 U JPH01119152 U JP H01119152U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- ground
- extraction
- source housing
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1421088U JPH01119152U (en:Method) | 1988-02-05 | 1988-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1421088U JPH01119152U (en:Method) | 1988-02-05 | 1988-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01119152U true JPH01119152U (en:Method) | 1989-08-11 |
Family
ID=31225206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1421088U Pending JPH01119152U (en:Method) | 1988-02-05 | 1988-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01119152U (en:Method) |
-
1988
- 1988-02-05 JP JP1421088U patent/JPH01119152U/ja active Pending