JPH01119054U - - Google Patents
Info
- Publication number
- JPH01119054U JPH01119054U JP1114788U JP1114788U JPH01119054U JP H01119054 U JPH01119054 U JP H01119054U JP 1114788 U JP1114788 U JP 1114788U JP 1114788 U JP1114788 U JP 1114788U JP H01119054 U JPH01119054 U JP H01119054U
- Authority
- JP
- Japan
- Prior art keywords
- container
- target
- substrate
- sputtering device
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000696 magnetic material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例を示す構成図、第
２図は従来のスパツタ装置の一例を示す構成図で
ある。
１……容器、３……基板、４……超電導材、５
……ターゲツト。なお、各図中、同一符号は同一
又は相当部分を示す。
FIG. 1 is a block diagram showing an embodiment of this invention, and FIG. 2 is a block diagram showing an example of a conventional sputtering device. 1... Container, 3... Substrate, 4... Superconducting material, 5
...Target. In each figure, the same reference numerals indicate the same or equivalent parts.
Claims (1)
れたスパツタ装置において、前記容器の内壁に超
電導材が被覆され、かつ前記ターゲツトは磁性体
であることを特徴とするスパツタ装置。 1. A sputtering device in which a target and a substrate are provided facing each other in a container, wherein an inner wall of the container is coated with a superconducting material, and the target is a magnetic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1114788U JPH01119054U (en) | 1988-02-01 | 1988-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1114788U JPH01119054U (en) | 1988-02-01 | 1988-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01119054U true JPH01119054U (en) | 1989-08-11 |
Family
ID=31219441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1114788U Pending JPH01119054U (en) | 1988-02-01 | 1988-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01119054U (en) |
-
1988
- 1988-02-01 JP JP1114788U patent/JPH01119054U/ja active Pending