JPH01119054U - - Google Patents

Info

Publication number

JPH01119054U

JPH01119054U JP1114788U JP1114788U JPH01119054U JP H01119054 U JPH01119054 U JP H01119054U JP 1114788 U JP1114788 U JP 1114788U JP 1114788 U JP1114788 U JP 1114788U JP H01119054 U JPH01119054 U JP H01119054U

Authority

JP

Japan

Prior art keywords

container

target

substrate

sputtering device

coated

Prior art date

1988-02-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000463 material Substances 0.000 claims description 2
• 238000004544 sputter deposition Methods 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 239000000696 magnetic material Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2