JPH01119053U - - Google Patents
Info
- Publication number
- JPH01119053U JPH01119053U JP1050588U JP1050588U JPH01119053U JP H01119053 U JPH01119053 U JP H01119053U JP 1050588 U JP1050588 U JP 1050588U JP 1050588 U JP1050588 U JP 1050588U JP H01119053 U JPH01119053 U JP H01119053U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vacuum container
- maintenance door
- sputtering apparatus
- positioned opposite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1050588U JPH01119053U (enExample) | 1988-01-30 | 1988-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1050588U JPH01119053U (enExample) | 1988-01-30 | 1988-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01119053U true JPH01119053U (enExample) | 1989-08-11 |
Family
ID=31218229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1050588U Pending JPH01119053U (enExample) | 1988-01-30 | 1988-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01119053U (enExample) |
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1988
- 1988-01-30 JP JP1050588U patent/JPH01119053U/ja active Pending