JPH01118339U - - Google Patents

Info

Publication number

JPH01118339U

JPH01118339U JP1119188U JP1119188U JPH01118339U JP H01118339 U JPH01118339 U JP H01118339U JP 1119188 U JP1119188 U JP 1119188U JP 1119188 U JP1119188 U JP 1119188U JP H01118339 U JPH01118339 U JP H01118339U

Authority

JP

Japan

Prior art keywords

main pipe

filtration system

temperature chemical

piping device

circulation filtration

Prior art date

1988-02-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001914 filtration Methods 0.000 claims description 4
• 239000000126 substance Substances 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims 1
• 235000012431 wafers Nutrition 0.000 claims 1
• 239000004809 Teflon Substances 0.000 description 2
• 229920006362 Teflon® Polymers 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 238000009434 installation Methods 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Cited By (1)