JPH01116435U - - Google Patents
Info
- Publication number
- JPH01116435U JPH01116435U JP1050788U JP1050788U JPH01116435U JP H01116435 U JPH01116435 U JP H01116435U JP 1050788 U JP1050788 U JP 1050788U JP 1050788 U JP1050788 U JP 1050788U JP H01116435 U JPH01116435 U JP H01116435U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- inner tank
- chemical solution
- chemical liquid
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1050788U JPH01116435U (en, 2012) | 1988-01-30 | 1988-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1050788U JPH01116435U (en, 2012) | 1988-01-30 | 1988-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01116435U true JPH01116435U (en, 2012) | 1989-08-07 |
Family
ID=31218233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1050788U Pending JPH01116435U (en, 2012) | 1988-01-30 | 1988-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01116435U (en, 2012) |
-
1988
- 1988-01-30 JP JP1050788U patent/JPH01116435U/ja active Pending