JPH01116400U - - Google Patents
Info
- Publication number
- JPH01116400U JPH01116400U JP1134388U JP1134388U JPH01116400U JP H01116400 U JPH01116400 U JP H01116400U JP 1134388 U JP1134388 U JP 1134388U JP 1134388 U JP1134388 U JP 1134388U JP H01116400 U JPH01116400 U JP H01116400U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- ring
- viewing window
- sight glass
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 claims description 4
- 239000000498 cooling water Substances 0.000 claims description 3
- 239000005357 flat glass Substances 0.000 claims 2
- 238000013021 overheating Methods 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1134388U JPH0636480Y2 (ja) | 1988-01-29 | 1988-01-29 | チャンバ覗窓用ｏリングの過熱防止構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1134388U JPH0636480Y2 (ja) | 1988-01-29 | 1988-01-29 | チャンバ覗窓用ｏリングの過熱防止構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01116400U true JPH01116400U (en, 2012) | 1989-08-04 |
| JPH0636480Y2 JPH0636480Y2 (ja) | 1994-09-21 |
Family
ID=31219815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1134388U Expired - Lifetime JPH0636480Y2 (ja) | 1988-01-29 | 1988-01-29 | チャンバ覗窓用ｏリングの過熱防止構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636480Y2 (en, 2012) |
-
1988
- 1988-01-29 JP JP1134388U patent/JPH0636480Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0636480Y2 (ja) | 1994-09-21 |