JPH01115234U - - Google Patents
Info
- Publication number
- JPH01115234U JPH01115234U JP818688U JP818688U JPH01115234U JP H01115234 U JPH01115234 U JP H01115234U JP 818688 U JP818688 U JP 818688U JP 818688 U JP818688 U JP 818688U JP H01115234 U JPH01115234 U JP H01115234U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- central axes
- orientation flat
- distance
- equal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP818688U JPH01115234U (es) | 1988-01-27 | 1988-01-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP818688U JPH01115234U (es) | 1988-01-27 | 1988-01-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01115234U true JPH01115234U (es) | 1989-08-03 |
Family
ID=31213840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP818688U Pending JPH01115234U (es) | 1988-01-27 | 1988-01-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01115234U (es) |
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1988
- 1988-01-27 JP JP818688U patent/JPH01115234U/ja active Pending