JPH01115153U - - Google Patents

Info

Publication number

JPH01115153U

JPH01115153U JP1035188U JP1035188U JPH01115153U JP H01115153 U JPH01115153 U JP H01115153U JP 1035188 U JP1035188 U JP 1035188U JP 1035188 U JP1035188 U JP 1035188U JP H01115153 U JPH01115153 U JP H01115153U

Authority

JP

Japan

Prior art keywords

electrons

primary

emits

processed

secondary electrons

Prior art date

1988-01-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005468 ion implantation Methods 0.000 claims description 3
• 238000010884 ion-beam technique Methods 0.000 claims description 2
• 239000007943 implant Substances 0.000 claims 1
• 150000002500 ions Chemical class 0.000 claims 1
• 230000001678 irradiating effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2