JPH01115152U - - Google Patents

Info

Publication number
JPH01115152U
JPH01115152U JP1145088U JP1145088U JPH01115152U JP H01115152 U JPH01115152 U JP H01115152U JP 1145088 U JP1145088 U JP 1145088U JP 1145088 U JP1145088 U JP 1145088U JP H01115152 U JPH01115152 U JP H01115152U
Authority
JP
Japan
Prior art keywords
beam mask
mask
faraday flag
platen
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1145088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1145088U priority Critical patent/JPH01115152U/ja
Publication of JPH01115152U publication Critical patent/JPH01115152U/ja
Pending legal-status Critical Current

Links

JP1145088U 1988-01-29 1988-01-29 Pending JPH01115152U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1145088U JPH01115152U (US06521211-20030218-C00004.png) 1988-01-29 1988-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1145088U JPH01115152U (US06521211-20030218-C00004.png) 1988-01-29 1988-01-29

Publications (1)

Publication Number Publication Date
JPH01115152U true JPH01115152U (US06521211-20030218-C00004.png) 1989-08-02

Family

ID=31220016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1145088U Pending JPH01115152U (US06521211-20030218-C00004.png) 1988-01-29 1988-01-29

Country Status (1)

Country Link
JP (1) JPH01115152U (US06521211-20030218-C00004.png)

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