JPH01114670U - - Google Patents

Info

Publication number
JPH01114670U
JPH01114670U JP670088U JP670088U JPH01114670U JP H01114670 U JPH01114670 U JP H01114670U JP 670088 U JP670088 U JP 670088U JP 670088 U JP670088 U JP 670088U JP H01114670 U JPH01114670 U JP H01114670U
Authority
JP
Japan
Prior art keywords
substrate
substrate holder
chamber
sputtering
line continuous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP670088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP670088U priority Critical patent/JPH01114670U/ja
Publication of JPH01114670U publication Critical patent/JPH01114670U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP670088U 1988-01-22 1988-01-22 Pending JPH01114670U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP670088U JPH01114670U (enrdf_load_stackoverflow) 1988-01-22 1988-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP670088U JPH01114670U (enrdf_load_stackoverflow) 1988-01-22 1988-01-22

Publications (1)

Publication Number Publication Date
JPH01114670U true JPH01114670U (enrdf_load_stackoverflow) 1989-08-02

Family

ID=31211085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP670088U Pending JPH01114670U (enrdf_load_stackoverflow) 1988-01-22 1988-01-22

Country Status (1)

Country Link
JP (1) JPH01114670U (enrdf_load_stackoverflow)

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