JPH01114667U - - Google Patents

Info

Publication number

JPH01114667U

JPH01114667U JP772288U JP772288U JPH01114667U JP H01114667 U JPH01114667 U JP H01114667U JP 772288 U JP772288 U JP 772288U JP 772288 U JP772288 U JP 772288U JP H01114667 U JPH01114667 U JP H01114667U

Authority

JP

Japan

Prior art keywords

superconducting

chamber

producing

anode

cathode

Prior art date

1988-01-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000843 powder Substances 0.000 claims description 3
• 239000000696 magnetic material Substances 0.000 claims description 2
• 238000004544 sputter deposition Methods 0.000 claims description 2
• 239000000463 material Substances 0.000 claims 2
• 239000000126 substance Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000000758 substrate Substances 0.000 description 1