JPH01114665U - - Google Patents
Info
- Publication number
- JPH01114665U JPH01114665U JP797488U JP797488U JPH01114665U JP H01114665 U JPH01114665 U JP H01114665U JP 797488 U JP797488 U JP 797488U JP 797488 U JP797488 U JP 797488U JP H01114665 U JPH01114665 U JP H01114665U
- Authority
- JP
- Japan
- Prior art keywords
- connectors
- chamber
- pair
- thin film
- connection terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP797488U JPH0527486Y2 (https=) | 1988-01-25 | 1988-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP797488U JPH0527486Y2 (https=) | 1988-01-25 | 1988-01-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01114665U true JPH01114665U (https=) | 1989-08-02 |
| JPH0527486Y2 JPH0527486Y2 (https=) | 1993-07-13 |
Family
ID=31213441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP797488U Expired - Lifetime JPH0527486Y2 (https=) | 1988-01-25 | 1988-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527486Y2 (https=) |
-
1988
- 1988-01-25 JP JP797488U patent/JPH0527486Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0527486Y2 (https=) | 1993-07-13 |