JPH01113342U - - Google Patents

Info

Publication number
JPH01113342U
JPH01113342U JP907488U JP907488U JPH01113342U JP H01113342 U JPH01113342 U JP H01113342U JP 907488 U JP907488 U JP 907488U JP 907488 U JP907488 U JP 907488U JP H01113342 U JPH01113342 U JP H01113342U
Authority
JP
Japan
Prior art keywords
rings
semiconductor wafer
semiconductor wafers
punching plate
wafer cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP907488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP907488U priority Critical patent/JPH01113342U/ja
Publication of JPH01113342U publication Critical patent/JPH01113342U/ja
Pending legal-status Critical Current

Links

JP907488U 1988-01-26 1988-01-26 Pending JPH01113342U (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP907488U JPH01113342U (sv) 1988-01-26 1988-01-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP907488U JPH01113342U (sv) 1988-01-26 1988-01-26

Publications (1)

Publication Number Publication Date
JPH01113342U true JPH01113342U (sv) 1989-07-31

Family

ID=31215507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP907488U Pending JPH01113342U (sv) 1988-01-26 1988-01-26

Country Status (1)

Country Link
JP (1) JPH01113342U (sv)

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