JPH01113340U - - Google Patents
Info
- Publication number
- JPH01113340U JPH01113340U JP799088U JP799088U JPH01113340U JP H01113340 U JPH01113340 U JP H01113340U JP 799088 U JP799088 U JP 799088U JP 799088 U JP799088 U JP 799088U JP H01113340 U JPH01113340 U JP H01113340U
- Authority
- JP
- Japan
- Prior art keywords
- container
- substrates
- storage grooves
- jig
- storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP799088U JPH01113340U (https=) | 1988-01-25 | 1988-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP799088U JPH01113340U (https=) | 1988-01-25 | 1988-01-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01113340U true JPH01113340U (https=) | 1989-07-31 |
Family
ID=31213469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP799088U Pending JPH01113340U (https=) | 1988-01-25 | 1988-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01113340U (https=) |
-
1988
- 1988-01-25 JP JP799088U patent/JPH01113340U/ja active Pending