JPH01113240U - - Google Patents

Info

Publication number

JPH01113240U

JPH01113240U JP862288U JP862288U JPH01113240U JP H01113240 U JPH01113240 U JP H01113240U JP 862288 U JP862288 U JP 862288U JP 862288 U JP862288 U JP 862288U JP H01113240 U JPH01113240 U JP H01113240U

Authority

JP

Japan

Prior art keywords

light

image

film

positioning mark

onto

Prior art date

1988-01-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 4
• 239000013307 optical fiber Substances 0.000 claims 4
• 238000000206 photolithography Methods 0.000 claims 3
• 238000005286 illumination Methods 0.000 claims 1
• 239000000835 fiber Substances 0.000 description 3
• 230000006835 compression Effects 0.000 description 1
• 238000007906 compression Methods 0.000 description 1
• QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
• 229910052753 mercury Inorganic materials 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1
• 238000004804 winding Methods 0.000 description 1