JPH01112556U - - Google Patents

Info

Publication number
JPH01112556U
JPH01112556U JP748288U JP748288U JPH01112556U JP H01112556 U JPH01112556 U JP H01112556U JP 748288 U JP748288 U JP 748288U JP 748288 U JP748288 U JP 748288U JP H01112556 U JPH01112556 U JP H01112556U
Authority
JP
Japan
Prior art keywords
ion source
vaporizer
evaporation source
head
separated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP748288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP748288U priority Critical patent/JPH01112556U/ja
Publication of JPH01112556U publication Critical patent/JPH01112556U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP748288U 1988-01-22 1988-01-22 Pending JPH01112556U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP748288U JPH01112556U (enrdf_load_stackoverflow) 1988-01-22 1988-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP748288U JPH01112556U (enrdf_load_stackoverflow) 1988-01-22 1988-01-22

Publications (1)

Publication Number Publication Date
JPH01112556U true JPH01112556U (enrdf_load_stackoverflow) 1989-07-28

Family

ID=31212526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP748288U Pending JPH01112556U (enrdf_load_stackoverflow) 1988-01-22 1988-01-22

Country Status (1)

Country Link
JP (1) JPH01112556U (enrdf_load_stackoverflow)

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