JPH01112040U - - Google Patents

Info

Publication number

JPH01112040U

JPH01112040U JP595488U JP595488U JPH01112040U JP H01112040 U JPH01112040 U JP H01112040U JP 595488 U JP595488 U JP 595488U JP 595488 U JP595488 U JP 595488U JP H01112040 U JPH01112040 U JP H01112040U

Authority

JP

Japan

Prior art keywords

resist

wafer

light irradiation

transports

predetermined position

Prior art date

1988-01-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 230000007246 mechanism Effects 0.000 claims 3
• 230000032258 transport Effects 0.000 claims 2
• 230000007723 transport mechanism Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000000835 fiber Substances 0.000 description 2
• 238000001514 detection method Methods 0.000 description 1
• 230000001678 irradiating effect Effects 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 230000002093 peripheral effect Effects 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1