JPH01110258U - - Google Patents

Info

Publication number
JPH01110258U
JPH01110258U JP629988U JP629988U JPH01110258U JP H01110258 U JPH01110258 U JP H01110258U JP 629988 U JP629988 U JP 629988U JP 629988 U JP629988 U JP 629988U JP H01110258 U JPH01110258 U JP H01110258U
Authority
JP
Japan
Prior art keywords
glass disk
bottom groove
disk
circular opening
pallet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP629988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP629988U priority Critical patent/JPH01110258U/ja
Publication of JPH01110258U publication Critical patent/JPH01110258U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP629988U 1988-01-21 1988-01-21 Pending JPH01110258U (US20020128544A1-20020912-P00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP629988U JPH01110258U (US20020128544A1-20020912-P00008.png) 1988-01-21 1988-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP629988U JPH01110258U (US20020128544A1-20020912-P00008.png) 1988-01-21 1988-01-21

Publications (1)

Publication Number Publication Date
JPH01110258U true JPH01110258U (US20020128544A1-20020912-P00008.png) 1989-07-25

Family

ID=31210402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP629988U Pending JPH01110258U (US20020128544A1-20020912-P00008.png) 1988-01-21 1988-01-21

Country Status (1)

Country Link
JP (1) JPH01110258U (US20020128544A1-20020912-P00008.png)

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