JPH01109536A - Angle fine adjusting mechanism - Google Patents

Angle fine adjusting mechanism

Info

Publication number
JPH01109536A
JPH01109536A JP62268525A JP26852587A JPH01109536A JP H01109536 A JPH01109536 A JP H01109536A JP 62268525 A JP62268525 A JP 62268525A JP 26852587 A JP26852587 A JP 26852587A JP H01109536 A JPH01109536 A JP H01109536A
Authority
JP
Japan
Prior art keywords
block
angle
actuators
laminated piezoelectric
fixed block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62268525A
Other languages
Japanese (ja)
Inventor
Akihiko Makita
昭彦 蒔田
Masaharu Moritsugu
森次 政春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62268525A priority Critical patent/JPH01109536A/en
Publication of JPH01109536A publication Critical patent/JPH01109536A/en
Pending legal-status Critical Current

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  • Moving Of The Head For Recording And Reproducing By Optical Means (AREA)
  • Optical Recording Or Reproduction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To obtain an angle fine adjusting mechanism to be able to maintain a neutral point under zero voltage by equipping the title device with a movable block supported with two laminating-type piezoelectric actuators, which are position-adjustable symmetrically to the middle line of a fixed block, and two rigid thin band plates. CONSTITUTION:Two laminating-type piezoelectric actuators 2 and 3 are arranged in parallel in their expanding direction, and while a fixed block 4 is provided at an interval (d) between each of the actuators and the block 4, a movable block 5 is provided, which is press-contacted on the other edge of the device, at symmetrical positions to the medium line of each block, two rigid thin band plates 7 and 8, which can expand minutely, are linked to the fixed block 4 and the movable block 5. Since the actuators 2 and 3 are held so that the interval (d) between the block 4 and each of them can be adjusted with push screws 9 and 10, the actuators 2 and 3 can set the initial angle (the angle to be the neutral point) and can accurately fine-adjust angles alpha and betato correspond to the difference in voltage to be impressed.

Description

【発明の詳細な説明】 〔概 要〕 本発明は角度制御機構に係り、特に2ビ一ム方式の光学
ヘッドの光点位置制御に利用して好適な角度微調機構に
関し、 中立点を零電圧で維持可能な積層型圧電アクチュエータ
の角度微調機構の提供を目的とし、2本の積層型圧電ア
クチュエータをその伸縮方向に並列配置し、前記積層型
圧電アクチュエータの一端と間隙を介して固定ブロック
を設けると共に、他端に圧接する可動ブロックを設け、
前記各積層型圧電アクチュエータの中心軸を含む平面内
で、当該各中心軸の中間線に対して対称位置に対向する
2枚の微小伸縮可能な剛性薄帯板を前記固定ブロックと
可動ブロックに連結し、前記固定ブロックに前記間隙を
調節可能で、かつ前記積層型圧電アクチュエータを保持
する押し螺子を設けて構成する。
[Detailed Description of the Invention] [Summary] The present invention relates to an angle control mechanism, and in particular to a fine angle adjustment mechanism suitable for use in controlling the light spot position of a two-beam optical head. In order to provide a mechanism for finely adjusting the angle of a laminated piezoelectric actuator that can be maintained at a constant angle, two laminated piezoelectric actuators are arranged in parallel in the direction of expansion and contraction, and a fixing block is provided at one end of the laminated piezoelectric actuator with a gap therebetween. At the same time, a movable block is provided that presses against the other end,
In a plane including the central axes of each of the laminated piezoelectric actuators, two microstretchable rigid thin strip plates facing each other in symmetrical positions with respect to the median line of each of the central axes are connected to the fixed block and the movable block. The fixing block is provided with a push screw that can adjust the gap and holds the laminated piezoelectric actuator.

〔産業上の利用分野〕[Industrial application field]

本発明は角度制御機構に係り、特に2ビ一ム方式の光学
ヘッドの光点位置制御に利用して好適な角度微調機構に
関する。
The present invention relates to an angle control mechanism, and particularly to an angle fine adjustment mechanism suitable for use in controlling the light spot position of a two-beam optical head.

最近の光デイスク装置の光学ヘッドには、記録媒体に情
報を記録させるための記録用ビームと、記録の信顛性を
確認するために記録した情報が正確に記録されているか
どうかを記録直後にチエツクを行う再生用ビームとによ
り記録、再生を同時に行う2ビ一ム方式が採用され、同
一トラック上に2個の光点位置を正確に制御するための
微調整手段の開発が望まれている。
The optical head of modern optical disk devices has a recording beam for recording information on a recording medium, and a beam that checks whether the recorded information is accurately recorded immediately after recording to confirm the authenticity of the recording. A two-beam system has been adopted in which recording and playback are performed simultaneously using a playback beam that performs checking, and it is desired to develop a means for fine adjustment to accurately control the positions of two light spots on the same track. .

〔従来の技術〕[Conventional technology]

三成分系ジルコン・チタン酸鉛系のような金属酸化物粉
末を、粉末冶金的方法により成型、焼結して得られる圧
電性物質の素片を、適当な形状。
A piece of piezoelectric material obtained by molding and sintering metal oxide powder such as ternary zircon/lead titanate powder using a powder metallurgy method is shaped into an appropriate shape.

寸法に加工し、これに分極、駆動の目的で対向する2面
に金属電極を密着させ、この両極間に直流高電圧を印加
し、内部に残留分極と残留ひずみとを生ぜしめた磁気素
体を積層してなる所謂セラミック型積層型圧電アクチュ
エータは、精密微調機器用のアクチュエータとして広く
用いられている。
A magnetic element that is processed into a size, has metal electrodes closely attached to two opposing surfaces for the purpose of polarization and driving, and applies a DC high voltage between these two electrodes to create residual polarization and residual strain inside. A so-called ceramic laminated piezoelectric actuator made of laminated layers is widely used as an actuator for precision fine adjustment equipment.

圧電セラミックを構成する強誘電体結晶は双極子能率を
有し、その方向は一定である。この焼結体は焼結状態で
は焼結軸はあらゆる方向に統計的分布をしているが、こ
れに直流高電圧を印加すれば双極子の方向が電場方向に
並び、結晶全体としては電場方向に伸び直角方向に収縮
する。この状態は外部電場を取り去っても結晶内部に固
定される。これを残留分極という。残留分極のある素体
に外部から交番電界が作用すれば、素体はその電場の大
きさにしたがって分極方向に伸縮する性質を用いてその
変位を精密微調整に利用するものである。
The ferroelectric crystal that constitutes the piezoelectric ceramic has dipole efficiency, and its direction is constant. In this sintered body, the sintering axis is statistically distributed in all directions in the sintered state, but when a high DC voltage is applied to it, the direction of the dipoles is aligned in the direction of the electric field, and the crystal as a whole is aligned in the direction of the electric field. It stretches in the direction and contracts in the perpendicular direction. This state remains fixed inside the crystal even if the external electric field is removed. This is called residual polarization. When an alternating electric field is applied from the outside to an element body with residual polarization, the element body expands and contracts in the polarization direction according to the magnitude of the electric field, and this displacement is used for precise fine adjustment.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

積層型圧電アクチュエータは、電圧印加によりその分極
方向に伸びることはできるが、逆極性の電圧印加によっ
て縮むことは出来ない欠点がある。
A laminated piezoelectric actuator can be expanded in its polarization direction by applying a voltage, but has the disadvantage that it cannot be contracted by applying a voltage of opposite polarity.

そのため角度調整のように、ある中立点を基準として両
方向に微調したいときは、その中立点はある電圧を印加
した所に定めなければならず、電圧を印加しないときは
一方に偏ってしまい、機械的に中立点を維持することが
できない欠点がある。
Therefore, when you want to make fine adjustments in both directions based on a certain neutral point, such as when adjusting the angle, the neutral point must be set at a place where a certain voltage is applied, and when no voltage is applied, it will be biased to one side, and the machine The disadvantage is that it is not possible to maintain a neutral point.

本発明は、上記従来の欠点に鑑みてなされたもので、中
立点を零電圧で維持可能な積層型圧電アクチュエータの
角度微調機構の提供を目的とする。
The present invention has been made in view of the above-mentioned conventional drawbacks, and an object of the present invention is to provide a fine angle adjustment mechanism for a laminated piezoelectric actuator that can maintain a neutral point at zero voltage.

〔問題点を解決するための手段〕[Means for solving problems]

第1図は、本発明の角度微調機構1の原理図である。2
本の積層型圧電アクチュエータ2,3をその伸縮方向に
並列配置し、前記積層型圧電アクチュエータ2.3の一
端と間隙dを介して固定ブロック4を設けると共に、他
端に圧接する可動ブロック5を設け、前記各積層型圧電
アクチュエータ2.3の中心軸を含む平面内で、当該各
中心軸の中間線6に対して対称位置に対向する2枚の微
小伸縮可能な剛性薄帯板7.8を前記固定ブロック4と
可動ブロック5に連結し、前記固定ブロック4に前記間
隙dを調節可能で、かつ前記積層型圧電アクチエエータ
2,3を保持する押し螺子9゜10を設けて構成する。
FIG. 1 is a principle diagram of the angle fine adjustment mechanism 1 of the present invention. 2
The laminated piezoelectric actuators 2 and 3 are arranged in parallel in the direction of expansion and contraction, and a fixed block 4 is provided with a gap d between one end of the laminated piezoelectric actuator 2.3, and a movable block 5 is pressed against the other end. Two micro-expandable rigid thin strip plates 7.8 are provided, and are arranged in a plane including the central axis of each of the laminated piezoelectric actuators 2.3, facing each other at symmetrical positions with respect to the median line 6 of each of the central axes. is connected to the fixed block 4 and the movable block 5, and the fixed block 4 is provided with push screws 9.degree. 10 which can adjust the gap d and hold the laminated piezoelectric actuators 2 and 3.

〔作 用〕[For production]

押し螺子9,10を調節することにより可動面11の初
期角度〔中立点となる角度)の設定ができる。
By adjusting the push screws 9 and 10, the initial angle of the movable surface 11 (the angle that becomes the neutral point) can be set.

この状態において積層型圧電アクチュエータ2に電圧を
印加すると、その電圧に対応する変位a1が剛性薄帯板
7の張力に抗して位置b0を軸として発生し、可動面1
0は角度αだけ微調できる。また、積層型圧電アクチュ
エータ3に電圧を印加するとその電圧に対応する変位b
1が剛性薄帯板8の張力に抗して位置a0を軸として発
生し可動面11は角度βだけ微調できる。勿論両積層型
圧電アクチュエータ2,3に電圧を印加すればその電圧
の差に対応する可動面の角度変化が得られる。角度微調
機構1は取り付は穴12によって本発明の機構を使用す
る装置に取り付ける。
When a voltage is applied to the laminated piezoelectric actuator 2 in this state, a displacement a1 corresponding to the voltage is generated around the position b0 against the tension of the rigid thin strip plate 7, and the movable surface 1
0 can be finely adjusted by angle α. Furthermore, when a voltage is applied to the laminated piezoelectric actuator 3, the displacement b corresponding to the voltage
1 is generated around the position a0 against the tension of the rigid thin strip plate 8, and the movable surface 11 can be finely adjusted by an angle β. Of course, if a voltage is applied to both the laminated piezoelectric actuators 2 and 3, a change in the angle of the movable surface corresponding to the difference in voltage can be obtained. The fine angle adjustment mechanism 1 is attached to a device using the mechanism of the present invention through a hole 12.

〔実施例〕〔Example〕

以下本発明の実施例を図面によって詳述する。 Embodiments of the present invention will be described in detail below with reference to the drawings.

なお、構成、動作の説明を理解し易くするために全図を
通じて同一部分には同一符号を付してその重複説明を省
略する。
Note that, in order to make the explanation of the configuration and operation easier to understand, the same parts are given the same reference numerals throughout all the figures, and repeated explanation thereof will be omitted.

第1図は本発明の角度微調機構の原理図を示す。FIG. 1 shows a principle diagram of the angle fine adjustment mechanism of the present invention.

図において、角度微調機構1は伸縮方向に並列配置され
た2本の積層型圧電素子2,3と、その一端と間隙dを
介して設けた固定ブロック4と、他端に圧接する可動ブ
ロック5と、各積層型圧電アクチュエータ2.3の中心
軸を含む平面内で、当該各中心軸の中間線6に対して対
称位置に対向する2枚の微小伸縮可能な剛性薄帯板7.
8を前記固定ブロック4と可動ブロック5に連結し、前
記固定ブロック4に前記間隙dを調節可能で、かつ前記
積層型圧電アクチュエータ2.3を保持する押し螺子9
.10とから構成されている。
In the figure, the angle fine adjustment mechanism 1 includes two laminated piezoelectric elements 2 and 3 arranged in parallel in the expansion/contraction direction, a fixed block 4 provided at one end with a gap d in between, and a movable block 5 pressed against the other end. and two micro-stretchable rigid thin strip plates 7., which face each other at symmetrical positions with respect to the median line 6 of each central axis within a plane containing the central axis of each laminated piezoelectric actuator 2.3.
8 to the fixed block 4 and the movable block 5, a push screw 9 capable of adjusting the gap d to the fixed block 4, and holding the laminated piezoelectric actuator 2.3.
.. It consists of 10.

固定ブロック4と可動ブロック5は変形しない剛体でこ
の両ブロックを連結する剛性薄帯Fi7 。
The fixed block 4 and the movable block 5 are rigid bodies that do not deform, and a rigid ribbon Fi7 connects the two blocks.

8は例えば厚み0.2〜0.5 mmのステンレス薄板
等を用いる。9aとlOaはそれぞれ積層型圧電アクチ
ュエータ2.3を押し螺子9.10で初期設定した後、
固定するためのロックナツトである。可動ブロック5の
端面ば角度を微調するための可動面11として利用され
る。角度微調機構1は取り付は穴12によって本発明の
機構を使用する装置に取り付ける。
For example, a thin stainless steel plate having a thickness of 0.2 to 0.5 mm is used as the material 8. 9a and lOa, after initializing the laminated piezoelectric actuator 2.3 with push screws 9.10,
This is a lock nut for fixing. The end face of the movable block 5 is used as a movable surface 11 for finely adjusting the angle. The fine angle adjustment mechanism 1 is attached to a device using the mechanism of the present invention through a hole 12.

第2図は本発明の詳細な説明図を示す。この図は本発明
の角度微調機構を用いて好適な2ビ一ム方式の光学ヘッ
ドの光点位置制御機構に関するものである。この光学ヘ
ッドは特開昭60−101734に開示されたものの改
良型で、情報の読み書きと消去、あるいは書き込み直後
の誤り検査等のために複数の光源を持ち、互いの光束の
光軸がなす角度を、何れか、あるいはそれぞれの光軸角
度を変化させることにより、記録媒体上でのそれぞれの
光点位置を調節できる機構を備えた光デイスク装置の光
学ヘッドである。
FIG. 2 shows a detailed illustration of the invention. This figure relates to a light spot position control mechanism for a preferred two-beam type optical head using the angle fine adjustment mechanism of the present invention. This optical head is an improved version of the one disclosed in Japanese Patent Application Laid-Open No. 60-101734, and has multiple light sources for reading, writing, erasing information, or checking for errors immediately after writing, and has angles formed by the optical axes of each light beam. This is an optical head for an optical disk device that is equipped with a mechanism that can adjust the position of each light spot on a recording medium by changing the optical axis angle of one or each of the following.

図において、記録用レーザ発生器14にて発生した記録
情報にて変調された記録レーザ光Wはコリメートレンズ
15を通して記録用ビーム偏向Fi16により正規の光
路方向に偏向され、光路上にある偏光ビームスプリッタ
21と174波長板22とを透過して対物レンズ23に
至る。対物レンズ23は入光した記録レーザ光Wを集束
し、゛その焦点を光記録媒体24の所定のトラックに合
わせて情報を記録する。
In the figure, a recording laser beam W modulated by recording information generated by a recording laser generator 14 passes through a collimating lens 15 and is deflected in the normal optical path direction by a recording beam deflector Fi 16, and is then deflected by a polarizing beam splitter on the optical path. 21 and the 174-wave plate 22 to reach the objective lens 23. The objective lens 23 focuses the incident recording laser beam W, sets its focus on a predetermined track of the optical recording medium 24, and records information.

一方、再生用レーザ発生器17にて発生した再生レーザ
光Mは、コリメートレンズ18を通して、再生用ビーム
偏向板19により正規の光路方向に偏向され、グイクロ
イックミラー20を介して、光路上にある偏光ビームス
プリッタ21と174波長板22とを透過して対物レン
ズ23に至る。ここで対物レンズ23は入光した再生レ
ーザ光Mを集束し、その焦点を前記した光記録媒体24
の所定のトラックに合わせて照射する。
On the other hand, the reproducing laser beam M generated by the reproducing laser generator 17 passes through the collimating lens 18, is deflected by the reproducing beam deflecting plate 19 in the normal optical path direction, and passes through the gicroic mirror 20 onto the optical path. The light passes through a polarizing beam splitter 21 and a 174-wave plate 22 and reaches an objective lens 23. Here, the objective lens 23 focuses the incident reproduction laser beam M and directs the focus onto the optical recording medium 2
irradiate according to a predetermined track.

この照射された光はトラック上に記録された情報により
変調され、反射光Zとなって174波長板22および偏
光ビームスプリフタ21を介して90度光路を偏向され
、フィルタ25を通り、集光レンズ26にて集光され、
光検知器27に至る。光検知器27にて反射光Zは電気
信号に変換され、光記録媒体24に記録された情報が再
生される。
This irradiated light is modulated by the information recorded on the track, becomes reflected light Z, is deflected through a 90 degree optical path via a 174 wavelength plate 22 and a polarizing beam splitter 21, passes through a filter 25, and is condensed. The light is focused by the lens 26,
The photodetector 27 is reached. The reflected light Z is converted into an electrical signal by the photodetector 27, and the information recorded on the optical recording medium 24 is reproduced.

この再生処理の目的は、光記録媒体に記録された情報の
信頼性を記録直後に確認することにあり、したがって同
一円周トラック上の記録用ビームWの焦点の直後に、再
生用ビームMの焦点が位置する必要がある。
The purpose of this reproducing process is to confirm the reliability of the information recorded on the optical recording medium immediately after recording. Therefore, the reproducing beam M is placed immediately after the focal point of the recording beam W on the same circumferential track. The focus needs to be located.

ここで偏光ビームスプリッタ21を透過する記録レーザ
光Wおよび再生レーザ光Mの一部分がフィルタ25と反
対方向に90度偏向されるように偏光ビームスプリッタ
21の偏光面を設定し、その偏向された記録レーザ光W
1および再生レーザ光h1を集光する集光レンズ28と
、集光レンズ28にて集光された記録レーザ光−1およ
び再生レーザ光M1の光量を検知して、各レーザ光の焦
点位置信号を出力する2光点トラックエラー信号検出回
路29が設けられている。
Here, the polarization plane of the polarization beam splitter 21 is set so that a portion of the recording laser beam W and reproduction laser beam M that pass through the polarization beam splitter 21 is deflected by 90 degrees in the opposite direction to the filter 25, and the polarization plane of the polarization beam splitter 21 is Laser light W
A condenser lens 28 condenses the recording laser beam M1 and the reproduction laser beam h1, and detects the light intensity of the recording laser beam M1 and the reproduction laser beam M1 condensed by the condenser lens 28, and generates a focal position signal of each laser beam. A two-light spot tracking error signal detection circuit 29 is provided which outputs the following.

2光点トランクエラー信号検出回路29により、2光点
の一方を基準として他方の相対的なトラックエラー量を
求め、このトラックエラー量を零とするように制御回路
30を介して角度微調機構1を駆動し、再生用ビームM
の位置ずれ補正を行うものである。
The two-light spot trunk error signal detection circuit 29 determines the relative amount of track error for one of the two light spots, and controls the angle fine adjustment mechanism 1 via the control circuit 30 so as to set this track error amount to zero. and reproduce beam M
This is to correct the positional deviation.

第3図はトラック上の複数光点の位置関係の実際寸法を
説明するための図である。第3図(a)は記録媒体半径
方向の光点位置、第3図(b)は記録媒体円周方向の光
点位置を示す。
FIG. 3 is a diagram for explaining the actual dimensions of the positional relationship of a plurality of light spots on a track. FIG. 3(a) shows the position of the light spot in the radial direction of the recording medium, and FIG. 3(b) shows the position of the light spot in the circumferential direction of the recording medium.

両図における対物レンズ23の焦点距離を仮に4mmと
し、第3図(a)における両ビームの光軸のなす角度を
θ【1両光点の許容距離をLLとすれば、θt=Q±0
.7 Xl0−3度、  Lt=0±0.O5l1m第
3図(blにおける両ビームの光軸のなす角度をθC9
両光点の距離をLcとすれば通常何れも誤差±10%の
範囲内で次の値をとる。
Assuming that the focal length of the objective lens 23 in both figures is 4 mm, and the angle formed by the optical axes of both beams in FIG.
.. 7 Xl0-3 degrees, Lt=0±0. O5l1m Fig. 3 (The angle formed by the optical axes of both beams at bl is θC9
Letting Lc be the distance between the two light spots, both normally take the following values within an error range of ±10%.

θc=0.1〜0.4度、Lc=数−〜数10−このよ
うに記録媒体円周方向はともかくとして、光記録媒体半
径方向の角度、距離ともに非常に高精度での位置合わせ
が必要となるが、角度微調機構1の可動面11に再生用
ビーム偏向板19をとりつけ、記録用ビームWを固定し
、再生用ビームMのダイクロイックミラー20に対する
入射角度をml整すれば、この光軸角度差は±0.01
度程度の範囲を0.0001度程度範囲確に変化させる
ことができ、トラック上のビームスポット位置を制御す
ることができる。
θc = 0.1 to 0.4 degrees, Lc = number - to number 10 - In this way, apart from the circumferential direction of the recording medium, alignment of both the angle and distance in the radial direction of the optical recording medium is possible with very high precision. Although necessary, if the reproducing beam deflection plate 19 is attached to the movable surface 11 of the angle fine adjustment mechanism 1, the recording beam W is fixed, and the incident angle of the reproducing beam M to the dichroic mirror 20 is adjusted by ml, this light can be adjusted. Axial angle difference is ±0.01
It is possible to accurately change the range of about 0.0001 degrees, and the beam spot position on the track can be controlled.

〔発明の効果〕〔Effect of the invention〕

以上の説明から明らかなように本発明によれば、積層型
圧電アクチュエータの数々の特徴に加え、電圧を印加し
ない状態で中立点に維持することができるので、制御側
のトラブル時、制御開始時(電源投入時)にも制御点に
近い状態で保持される。また、積層型圧電アクチュエー
タの欠点の一つは制御電圧が高いことであるが本発明に
よって制御に必要な電圧も1/2以下とすることができ
る効果がある。
As is clear from the above description, according to the present invention, in addition to the many features of the laminated piezoelectric actuator, it can be maintained at a neutral point without applying voltage, so when there is a problem on the control side or when control is started. It is maintained close to the control point even when the power is turned on. Further, one of the drawbacks of the laminated piezoelectric actuator is that the control voltage is high, but the present invention has the advantage that the voltage required for control can be reduced to 1/2 or less.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の角度微調機構の原理図、第2図は本発
明の詳細な説明図、 第3図はトラック上の複数光点の位置関係説明図を示す
。 第1図において、2と3は積層型圧電アクチュエータ、
4は固定ブロック、5は可動ブロック、6は中間線、7
と8は剛性薄帯板、9と10は押し螺子、dは間隙をそ
れぞれ示す。 暑 □二二 (Q)克言l佑柔伴對砂旬      tb)え記係中
不円廁か笥しラ−t 7 j: q子を教克炎。イl】
シ引イ条g明図第3図
FIG. 1 is a diagram showing the principle of the angle fine adjustment mechanism of the present invention, FIG. 2 is a detailed explanatory diagram of the present invention, and FIG. 3 is an explanatory diagram of the positional relationship of a plurality of light spots on a track. In Fig. 1, 2 and 3 are laminated piezoelectric actuators,
4 is a fixed block, 5 is a movable block, 6 is an intermediate line, 7
and 8 are rigid thin strip plates, 9 and 10 are push screws, and d is a gap, respectively. Summer □ 22 (Q) Kyuto 1 yū yū ban sā shun tb) Eki kanchu fuen kai ka sha-ra-t 7 j: q child is taught. ]
Figure 3

Claims (1)

【特許請求の範囲】 2本の積層型圧電アクチュエータ(2、3)をその伸縮
方向に並列配置し、 前記積層型圧電アクチュエータ(2、3)の一端と間隙
(d)を介して固定ブロック(4)を設けると共に、他
端に圧接する可動ブロック(5)を設け、 前記各積層型圧電アクチュエータ(2、3)の中心軸を
含む平面内で、当該各中心軸の中間線(6)に対して対
称位置に対向する2枚の微小伸縮可能な剛性薄帯板(7
、8)を前記固定ブロック(4)と可動ブロック(5)
に連結し、 前記固定ブロック(4)に前記間隙(d)を調節可能で
、かつ前記積層型圧電アクチュエータ(2、3)を保持
する押し螺子(9、10)を設けてなることを特徴とす
る角度微調機構。
[Claims] Two laminated piezoelectric actuators (2, 3) are arranged in parallel in the direction of expansion and contraction, and a fixed block ( 4), and a movable block (5) that is pressed into contact with the other end, and within a plane including the central axes of each of the laminated piezoelectric actuators (2, 3), on the midline (6) of each of the central axes. Two micro-stretchable rigid thin strip plates (7
, 8) to the fixed block (4) and the movable block (5).
, and the fixing block (4) is provided with push screws (9, 10) that are capable of adjusting the gap (d) and hold the laminated piezoelectric actuators (2, 3). Angle fine adjustment mechanism.
JP62268525A 1987-10-23 1987-10-23 Angle fine adjusting mechanism Pending JPH01109536A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62268525A JPH01109536A (en) 1987-10-23 1987-10-23 Angle fine adjusting mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62268525A JPH01109536A (en) 1987-10-23 1987-10-23 Angle fine adjusting mechanism

Publications (1)

Publication Number Publication Date
JPH01109536A true JPH01109536A (en) 1989-04-26

Family

ID=17459732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62268525A Pending JPH01109536A (en) 1987-10-23 1987-10-23 Angle fine adjusting mechanism

Country Status (1)

Country Link
JP (1) JPH01109536A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0800220A1 (en) * 1996-04-02 1997-10-08 MDC Max Dätwyler Bleienbach AG Fast responce piezoelectric actuator
WO2000041501A3 (en) * 1999-01-19 2000-11-23 Boeing Co Helicopter rotor blade flap actuator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0800220A1 (en) * 1996-04-02 1997-10-08 MDC Max Dätwyler Bleienbach AG Fast responce piezoelectric actuator
US5942837A (en) * 1996-04-02 1999-08-24 Mdc Max Datwyler Bleienbach Ag Highly dynamic piezo-electric drive mechanism
WO2000041501A3 (en) * 1999-01-19 2000-11-23 Boeing Co Helicopter rotor blade flap actuator

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