JPH01109200U - - Google Patents
Info
- Publication number
- JPH01109200U JPH01109200U JP367588U JP367588U JPH01109200U JP H01109200 U JPH01109200 U JP H01109200U JP 367588 U JP367588 U JP 367588U JP 367588 U JP367588 U JP 367588U JP H01109200 U JPH01109200 U JP H01109200U
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- slit
- joined
- air inflow
- rectangular waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
Description
第１図は本考案のスリツトを設けた第１の実施
例の方形導波管の斜視図、第２図は本考案のスリ
ツトを設けた導波管に冷却用空気流入口を取りつ
けた斜視図、第３図は本考案のスリツトを設けた
方形導波管から空気を流入させてガラス製プラズ
マ容器を冷却する状態を示す図、第４図は本考案
のスリツトを設けた方形導波管のスリツト面に金
属製メツシユを取付けた斜視図、第５図ａは第４
図に示す方形導波管に空気流入室を形成する側板
とフランジにカバを接合する前の状態を示す斜視
図であり、同図ｂはカバーを接合した後の状態を
示す斜視図、第６図は従来の方形導波管を使用し
たプラズマ生成装置の構成図である。
５……方形導波管、５ａ……スリツトを設けた
面、５ｂ，５ｃ……側板、６ｈ，７ｈ……冷却用
空気流入口、５ｆ，５ｇ……方形導波管のフラン
ジ、５ｓ……スリツト、６，７……カバー、８…
…金属製メツシユ、１１……テーパ接続変換器、
１２……円筒導波管、１２ａ〜１２ｎ……冷却用
空気排出口、１３……電磁石、１４……プラズマ
加工チヤンバ、１４ｇ……ガラス製プラズマ容器
、１４ｈ……加工用ガス供給口、１４ｊ……加工
用ガス排出口、Ｓ……空気流入室。
Fig. 1 is a perspective view of a rectangular waveguide of the first embodiment provided with the slits of the present invention, and Fig. 2 is a perspective view of the waveguide provided with the slits of the present invention with a cooling air inlet. , Fig. 3 is a diagram showing how a glass plasma vessel is cooled by inflowing air from the rectangular waveguide provided with the slits of the present invention, and Fig. 4 shows the state in which the rectangular waveguide provided with the slits of the present invention is cooled. A perspective view of the metal mesh attached to the slit surface, Figure 5a is the fourth
FIG. 6 is a perspective view showing a state before a cover is joined to the side plate and flange forming an air inflow chamber in the rectangular waveguide shown in the figure; FIG. The figure is a configuration diagram of a plasma generation device using a conventional rectangular waveguide. 5... Rectangular waveguide, 5a... Surface with slits, 5b, 5c... Side plate, 6h, 7h... Cooling air inlet, 5f, 5g... Flange of rectangular waveguide, 5s... Slit, 6, 7...Cover, 8...
...metal mesh, 11...tapered connection converter,
12...Cylindrical waveguide, 12a-12n...Cooling air outlet, 13...Electromagnet, 14...Plasma processing chamber, 14g...Glass plasma container, 14h...Processing gas supply port, 14j... ...Processing gas outlet, S...Air inflow chamber.
Claims (1)
する空気流入用の小さな幅のスリツト５ｓを設け
た導波管。 ２ 請求項１記載のスリツトに金属製メツシユ８
を接合した導波管。 ３ 請求項１又は請求項２において、スリツト５
ｓを設けた面５ａと垂直でスリツトをはさんだ２
面５ｂ，５ｃと導波管のフランジ両面５ｆ，５ｇ
とで囲まれた空間Ｓに冷却用空気流入口７ｈを取
付けたカバー７を接合した空気流入室を設けた導
波管。[Claims for Utility Model Registration] 1. A waveguide provided with a small width slit 5s for air inflow to cool the plasma container 14g in the axial direction of the waveguide. 2 Metal mesh 8 in the slit according to claim 1
A waveguide joined with 3 In claim 1 or claim 2, the slit 5
2 with a slit perpendicular to the surface 5a on which s is provided.
Surfaces 5b, 5c and both sides of the waveguide flange 5f, 5g
A waveguide is provided with an air inflow chamber in which a cover 7 to which a cooling air inlet 7h is attached is joined to a space S surrounded by.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP367588U JPH0641360Y2 (en) | 1988-01-14 | 1988-01-14 | Waveguide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP367588U JPH0641360Y2 (en) | 1988-01-14 | 1988-01-14 | Waveguide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01109200U true JPH01109200U (en) | 1989-07-24 |
| JPH0641360Y2 JPH0641360Y2 (en) | 1994-10-26 |
Family
ID=31205521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP367588U Expired - Lifetime JPH0641360Y2 (en) | 1988-01-14 | 1988-01-14 | Waveguide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0641360Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008066159A (en) * | 2006-09-08 | 2008-03-21 | Noritsu Koki Co Ltd | Plasma generator and workpiece treatment device using it |
| JP2008071500A (en) * | 2006-09-12 | 2008-03-27 | Noritsu Koki Co Ltd | Plasma generating device and work processing device using it |
-
1988
- 1988-01-14 JP JP367588U patent/JPH0641360Y2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008066159A (en) * | 2006-09-08 | 2008-03-21 | Noritsu Koki Co Ltd | Plasma generator and workpiece treatment device using it |
| JP2008071500A (en) * | 2006-09-12 | 2008-03-27 | Noritsu Koki Co Ltd | Plasma generating device and work processing device using it |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0641360Y2 (en) | 1994-10-26 |
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