JPH01109169U - - Google Patents

Info

Publication number
JPH01109169U
JPH01109169U JP447588U JP447588U JPH01109169U JP H01109169 U JPH01109169 U JP H01109169U JP 447588 U JP447588 U JP 447588U JP 447588 U JP447588 U JP 447588U JP H01109169 U JPH01109169 U JP H01109169U
Authority
JP
Japan
Prior art keywords
positioning mechanism
transmission mechanism
power transmission
micrometer
precision positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP447588U
Other languages
English (en)
Other versions
JPH0631642Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988004475U priority Critical patent/JPH0631642Y2/ja
Publication of JPH01109169U publication Critical patent/JPH01109169U/ja
Application granted granted Critical
Publication of JPH0631642Y2 publication Critical patent/JPH0631642Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Description

【図面の簡単な説明】
第１図は本実施例を示す側面図、第２図はクラ
ツチ部分の斜視図、第３図、第４図は本考案に係
る他の実施例を示す側面図、第５図は従来の例を
示す側面図である。 ６……マイクロメータヘツド、９……ステツプ
モータ、１６……動力伝達機構。

Claims (1)

    【実用新案登録請求の範囲】
  1. 探針と試料の位置合わせを１軸方向に行うため
    の精密位置決め機構において、該位置決め機構が
    マイクロメータヘツドと、該マイクロメータに付
    加されたピンと、回転伝達ピンとから成る動力伝
    達機構と、該動力伝達機構に直結したモータとか
    ら成ることを特徴とする精密位置決め機構。
JP1988004475U 1988-01-18 1988-01-18 精密位置決め機構 Expired - Lifetime JPH0631642Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988004475U JPH0631642Y2 (ja) 1988-01-18 1988-01-18 精密位置決め機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988004475U JPH0631642Y2 (ja) 1988-01-18 1988-01-18 精密位置決め機構

Publications (2)

Publication Number Publication Date
JPH01109169U true JPH01109169U (ja) 1989-07-24
JPH0631642Y2 JPH0631642Y2 (ja) 1994-08-22

Family

ID=31207022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988004475U Expired - Lifetime JPH0631642Y2 (ja) 1988-01-18 1988-01-18 精密位置決め機構

Country Status (1)

Country Link
JP (1) JPH0631642Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59152657U (ja) * 1983-03-31 1984-10-13 日本電子株式会社 電子顕微鏡等の試料移動装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59152657U (ja) * 1983-03-31 1984-10-13 日本電子株式会社 電子顕微鏡等の試料移動装置

Also Published As

Publication number Publication date
JPH0631642Y2 (ja) 1994-08-22

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