JPH01109168U - - Google Patents

Info

Publication number
JPH01109168U
JPH01109168U JP405388U JP405388U JPH01109168U JP H01109168 U JPH01109168 U JP H01109168U JP 405388 U JP405388 U JP 405388U JP 405388 U JP405388 U JP 405388U JP H01109168 U JPH01109168 U JP H01109168U
Authority
JP
Japan
Prior art keywords
substrate
base
holding device
held
magnetic fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP405388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP405388U priority Critical patent/JPH01109168U/ja
Publication of JPH01109168U publication Critical patent/JPH01109168U/ja
Pending legal-status Critical Current

Links

JP405388U 1988-01-16 1988-01-16 Pending JPH01109168U (US06649357-20031118-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP405388U JPH01109168U (US06649357-20031118-C00005.png) 1988-01-16 1988-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP405388U JPH01109168U (US06649357-20031118-C00005.png) 1988-01-16 1988-01-16

Publications (1)

Publication Number Publication Date
JPH01109168U true JPH01109168U (US06649357-20031118-C00005.png) 1989-07-24

Family

ID=31206223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP405388U Pending JPH01109168U (US06649357-20031118-C00005.png) 1988-01-16 1988-01-16

Country Status (1)

Country Link
JP (1) JPH01109168U (US06649357-20031118-C00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130017125A (ko) * 2011-08-10 2013-02-20 주성엔지니어링(주) 기판 지지 기구 및 그를 이용한 기판 처리 방법 및 그를 이용한 태양전지 제조방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130017125A (ko) * 2011-08-10 2013-02-20 주성엔지니어링(주) 기판 지지 기구 및 그를 이용한 기판 처리 방법 및 그를 이용한 태양전지 제조방법

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