JPH01108929U - - Google Patents
Info
- Publication number
- JPH01108929U JPH01108929U JP342488U JP342488U JPH01108929U JP H01108929 U JPH01108929 U JP H01108929U JP 342488 U JP342488 U JP 342488U JP 342488 U JP342488 U JP 342488U JP H01108929 U JPH01108929 U JP H01108929U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- charged particle
- particle beam
- chamber
- front chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 5
- 230000008602 contraction Effects 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP342488U JPH01108929U (enExample) | 1988-01-13 | 1988-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP342488U JPH01108929U (enExample) | 1988-01-13 | 1988-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01108929U true JPH01108929U (enExample) | 1989-07-24 |
Family
ID=31205047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP342488U Pending JPH01108929U (enExample) | 1988-01-13 | 1988-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01108929U (enExample) |
-
1988
- 1988-01-13 JP JP342488U patent/JPH01108929U/ja active Pending