JPH01108929U - - Google Patents

Info

Publication number
JPH01108929U
JPH01108929U JP342488U JP342488U JPH01108929U JP H01108929 U JPH01108929 U JP H01108929U JP 342488 U JP342488 U JP 342488U JP 342488 U JP342488 U JP 342488U JP H01108929 U JPH01108929 U JP H01108929U
Authority
JP
Japan
Prior art keywords
vacuum
charged particle
particle beam
chamber
front chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP342488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP342488U priority Critical patent/JPH01108929U/ja
Publication of JPH01108929U publication Critical patent/JPH01108929U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP342488U 1988-01-13 1988-01-13 Pending JPH01108929U (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP342488U JPH01108929U (cg-RX-API-DMAC7.html) 1988-01-13 1988-01-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP342488U JPH01108929U (cg-RX-API-DMAC7.html) 1988-01-13 1988-01-13

Publications (1)

Publication Number Publication Date
JPH01108929U true JPH01108929U (cg-RX-API-DMAC7.html) 1989-07-24

Family

ID=31205047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP342488U Pending JPH01108929U (cg-RX-API-DMAC7.html) 1988-01-13 1988-01-13

Country Status (1)

Country Link
JP (1) JPH01108929U (cg-RX-API-DMAC7.html)

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