JPH01108927U - - Google Patents
Info
- Publication number
- JPH01108927U JPH01108927U JP353488U JP353488U JPH01108927U JP H01108927 U JPH01108927 U JP H01108927U JP 353488 U JP353488 U JP 353488U JP 353488 U JP353488 U JP 353488U JP H01108927 U JPH01108927 U JP H01108927U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- wafers
- grooves
- types
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP353488U JPH01108927U (en, 2012) | 1988-01-14 | 1988-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP353488U JPH01108927U (en, 2012) | 1988-01-14 | 1988-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01108927U true JPH01108927U (en, 2012) | 1989-07-24 |
Family
ID=31205252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP353488U Pending JPH01108927U (en, 2012) | 1988-01-14 | 1988-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01108927U (en, 2012) |
-
1988
- 1988-01-14 JP JP353488U patent/JPH01108927U/ja active Pending